Inventor · disambiguated record
Kars Zeger Troost
Also filed as: TROOST KARS Z · TROOST KARS ZEGER
30 granted patents·3 pending applications·246 citations·filing 2004–2019
96Inventor score
Files withASML NETHERLANDS BV22ASML HOLDING NV6TROOST KARS ZEGER2ASML NETHERLAND BV1BLEEKER ARNO JAN1
Top patents by PatentIndex Score
33 records- 0195US7400382B2Light patterning device using tilting mirrors in a superpixel formASML HOLDING NV·Filed 2005·Granted Jul 15, 2008·24 cites·29 claims
- 0294US7965380B2Lithographic apparatus and device manufacturing methodASML NETHERLAND BV·Filed 2007·Granted Jun 21, 2011·21 cites·24 claims
- 0391US7440078B2Lithographic apparatus and device manufacturing method using interferometric and maskless exposure unitsASML NETHERLANDS BV·Filed 2005·Granted Oct 21, 2008·13 cites·20 claims
- 0490US7177012B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 13, 2007·30 cites·27 claims
- 0588US9417533B2Method of operating a patterning device and lithographic apparatusPROSYENTSOV VITALIY·Filed 2011·Granted Aug 16, 2016·15 cites·20 claims
- 0688US7548302B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jun 16, 2009·12 cites·45 claims
- 0788US7116403B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·30 cites·14 claims
- 0885US7209217B2Lithographic apparatus and device manufacturing method utilizing plural patterning devicesASML NETHERLANDS BV·Filed 2005·Granted Apr 24, 2007·8 cites·22 claims
- 0984US9958788B2Method of operating a patterning device and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 1084US7859647B2Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2008·Granted Dec 28, 2010·7 cites·10 claims
- 1179US7500218B2Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using sameASML NETHERLANDS BV·Filed 2004·Granted Mar 3, 2009·16 cites·29 claims
- 1278US7679715B2Lithographic processing cell, lithographic apparatus, track and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Mar 16, 2010·4 cites·22 claims
- 1378US7411652B2Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2004·Granted Aug 12, 2008·13 cites·14 claims
- 1477US7499146B2Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cuppingASML NETHERLANDS BV·Filed 2005·Granted Mar 3, 2009·4 cites·19 claims
- 1576US7728956B2Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation dataASML NETHERLANDS BV·Filed 2005·Granted Jun 1, 2010·5 cites·20 claims
- 1675US7362415B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·15 cites·20 claims
- 1769US8159647B2Lithographic apparatus and device manufacturing methodBLEEKER ARNO JAN·Filed 2008·Granted Apr 17, 2012·2 cites·26 claims
- 1868US8264667B2Lithographic apparatus and device manufacturing method using interferometric and other exposureTROOST KARS ZEGER·Filed 2006·Granted Sep 11, 2012·3 cites·34 claims
- 1966US8259285B2Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint dataTROOST KARS ZEGER·Filed 2006·Granted Sep 4, 2012·5 cites·25 claims
- 2066US7403259B2Lithographic processing cell, lithographic apparatus, track and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 22, 2008·7 cites·24 claims
- 2164US7123348B2Lithographic apparatus and method utilizing dose controlASML NETHERLANDS BV·Filed 2004·Granted Oct 17, 2006·5 cites·39 claims
- 2263US8009269B2Optimal rasterization for maskless lithographyASML HOLDING NV·Filed 2007·Granted Aug 30, 2011·2 cites·21 claims
- 2362US9176392B2Lithographic apparatus and device manufacturing method using dose controlASML NETHERLANDS BV·Filed 2014·Granted Nov 3, 2015·0 cites·14 claims
- 2454US9568833B2Method of operating a patterning device and lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted Feb 14, 2017·0 cites·20 claims
- 2552US11815808B2Method for high numerical aperture thru-slit source mask optimizationASML NETHERLANDS BV·Filed 2019·Granted Nov 14, 2023·0 cites·20 claims
- 2652US2007030471A1Lithographic apparatus and device manufacturing method using dose controlASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2748US7713667B2System and method for generating pattern data used to control a pattern generatorASML HOLDING NV·Filed 2004·Granted May 11, 2010·1 cites·16 claims
- 2848US7349068B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·1 cites·12 claims
- 2947US7304718B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·1 cites·17 claims
- 3044US7466394B2Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning arrayASML NETHERLANDS BV·Filed 2005·Granted Dec 16, 2008·0 cites·17 claims
- 3141US2006138349A1Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2004·Application pending·0 cites
- 3240US2007153249A1Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure typesASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 3339US7538855B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 26, 2009·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →