Inventor · disambiguated record
Kevin Bertsch
Also filed as: BERTSCH KEVIN
3 granted patents·2 pending applications·23 citations·filing 2004–2023
65Inventor score
Top patents by PatentIndex Score
5 records- 0181US7811153B1High throughput servo load cup with integrated wet chemistry deliveryNOVELLUS SYSTEMS INC·Filed 2007·Granted Oct 12, 2010·11 cites·29 claims
- 0265US7229339B2CMP apparatus and methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Jun 12, 2007·12 cites·11 claims
- 0350US2025179680A1Gap characterization in electrodeposition toolLAM RES CORP·Filed 2023·Application pending·0 cites
- 0441US2025022696A1Apparatuses and techniques for cleaning a multi-station semiconductor processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 0529US8261758B2Apparatus and method for cleaning and removing liquids from front and back sides of a rotating workpieceHARDIKAR VISHWAS·Filed 2006·Granted Sep 11, 2012·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →