Inventor · disambiguated record
Kensuke Demura
Also filed as: DEMURA KENSUKE
18 granted patents·10 pending applications·5 citations·filing 2013–2025
87Inventor score
Files withSHIBAURA MECHATRONICS CORP28
Top patents by PatentIndex Score
28 records- 0190US12097541B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Sep 24, 2024·2 cites·20 claims
- 0269US10734217B2Substrate treatment device and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Aug 4, 2020·1 cites·6 claims
- 0369US9513557B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Dec 6, 2016·1 cites·9 claims
- 0469US8999612B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Apr 7, 2015·1 cites·17 claims
- 0566US2025226240A1Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 0665US11609491B2Reflective mask cleaning apparatus and reflective mask cleaning methodSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Mar 21, 2023·0 cites·4 claims
- 0763US12472534B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2023·Granted Nov 18, 2025·0 cites·10 claims
- 0863US11355337B2Substrate treatment device and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2020·Granted Jun 7, 2022·0 cites·7 claims
- 0963US2025108411A1Substrate treatment apparatus and processing method of substrateSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 1061US12278120B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2022·Granted Apr 15, 2025·0 cites·18 claims
- 1157US12074055B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2022·Granted Aug 27, 2024·0 cites·20 claims
- 1257US2025336694A1Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 1355US2024096653A1Substrate treatment apparatus and method for treating substrateSHIBAURA MECHATRONICS CORP·Filed 2023·Application pending·0 cites
- 1454US11784040B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Oct 10, 2023·0 cites·20 claims
- 1554US2025222494A1Vibrating body and substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 1652US10773425B2Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Sep 15, 2020·0 cites·5 claims
- 1750US12165886B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Dec 10, 2024·0 cites·14 claims
- 1850US11948812B2Cooling device, substrate treatment device, cooling method, and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Apr 2, 2024·0 cites·19 claims
- 1948US12138671B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Nov 12, 2024·0 cites·9 claims
- 2048US2017017151A1Reflective mask cleaning apparatus and reflective mask cleaning methodSHIBAURA MECHATRONICS CORP·Filed 2015·Application pending·0 cites
- 2147US12005482B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Jun 11, 2024·0 cites·5 claims
- 2247US10668496B2Imprint template treatment apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Jun 2, 2020·0 cites·11 claims
- 2346US12109597B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Oct 8, 2024·0 cites·8 claims
- 2440US2018117796A1Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Application pending·0 cites
- 2539US10111313B2Plasma processing apparatus and plasma processing methodSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Oct 23, 2018·0 cites·9 claims
- 2638US2018022016A1Template for imprintSHIBAURA MECHATRONICS CORP·Filed 2017·Application pending·0 cites
- 2736US2018016673A1Imprint template manufacturing apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Application pending·0 cites
- 2833US2015380219A1Mounting Stage and Plasma Processing ApparatusSHIBAURA MECHATRONICS CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →