Inventor · disambiguated record
Kevin Griffin
Also filed as: GRIFFIN KEVIN · GRIFFIN KEVIN S · GRIFFIN KEVIN SLATE
36 granted patents·21 pending applications·42 citations·filing 1986–2025
95Inventor score
Top patents by PatentIndex Score
57 records- 0191US11230763B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·2 cites·14 claims
- 0290US11174553B2Gas distribution assembly for improved pump-purge and precursor deliveryAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·3 cites·17 claims
- 0388US11332828B2Gas distribution assembly mounting for fragile plates to prevent breakageAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·2 cites·20 claims
- 0488US10570511B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2015·Granted Feb 25, 2020·2 cites·13 claims
- 0587US9765434B2Apparatus for susceptor temperature verification and methods of useAPPLIED MATERIALS INC·Filed 2015·Granted Sep 19, 2017·2 cites·10 claims
- 0684US9721757B2Elongated capacitively coupled plasma source for high temperature low pressure environmentsAPPLIED MATERIALS INC·Filed 2016·Granted Aug 1, 2017·3 cites·18 claims
- 0782US10197385B2Intelligent hardstop for gap detection and control mechanismAPPLIED MATERIALS INC·Filed 2017·Granted Feb 5, 2019·3 cites·17 claims
- 0881US11430680B2Position and temperature monitoring of ALD platen susceptorAPPLIED MATERIALS INC·Filed 2019·Granted Aug 30, 2022·2 cites·12 claims
- 0981US10312120B2Position and temperature monitoring of ALD platen susceptorAPPLIED MATERIALS INC·Filed 2014·Granted Jun 4, 2019·4 cites·18 claims
- 1080US11821083B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·0 cites·19 claims
- 1180US11713508B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·18 claims
- 1280US11586789B2Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·13 claims
- 1380US2025365819A1PBN Heaters For ALD Temperature UniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1479US9617640B2Apparatus and methods for injector to substrate gap controlYUDOVSKY JOSEPH·Filed 2014·Granted Apr 11, 2017·4 cites·7 claims
- 1578US11530480B2Injector for batch processing and methods of useAPPLIED MATERIALS INC·Filed 2022·Granted Dec 20, 2022·0 cites·11 claims
- 1677US12442080B2Plasma showerhead assembly and method of reducing defectsAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·19 claims
- 1776US10273578B2Top lamp module for carousel deposition chamberAPPLIED MATERIALS INC·Filed 2014·Granted Apr 30, 2019·1 cites·17 claims
- 1875US10196741B2Wafer placement and gap control optimization through in situ feedbackAPPLIED MATERIALS INC·Filed 2014·Granted Feb 5, 2019·3 cites·17 claims
- 1974US11761083B2Methods for controlling a flow pulse shapeAPPLIED MATERIALS INC·Filed 2020·Granted Sep 19, 2023·0 cites·13 claims
- 2074US11396703B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2020·Granted Jul 26, 2022·0 cites·20 claims
- 2174US11043386B2Enhanced spatial ALD of metals through controlled precursor mixingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 22, 2021·1 cites·19 claims
- 2274US7921803B2Chamber components with increased pyrometry visibilityAPPLIED MATERIALS INC·Filed 2007·Granted Apr 12, 2011·5 cites·10 claims
- 2373US11584992B2Gas distribution assembly for improved pump-purge and precursor deliveryAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·0 cites·14 claims
- 2473US2023096772A1Apparatus and methods to reduce particles in a film deposition chamberAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2570US11887856B2Enhanced spatial ALD of metals through controlled precursor mixingAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·0 cites·17 claims
- 2669US10900125B2Apparatus for susceptor temperature verification and methods of useAPPLIED MATERIALS INC·Filed 2017·Granted Jan 26, 2021·0 cites·5 claims
- 2765US12340980B2Plasma showerhead with improved uniformityAPPLIED MATERIALS INC·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 2865US9355819B2Elongated capacitively coupled plasma source for high temperature low pressure environmentsFORSTER JOHN C·Filed 2014·Granted May 31, 2016·1 cites·20 claims
- 2965US2025135423A1Conduit, systems and methods for fluid temperature controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3065US2024360561A1Control of liquid delivery in auto-refill systemsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3164US11261525B2Injector for batch processing and methods of useAPPLIED MATERIALS INC·Filed 2016·Granted Mar 1, 2022·0 cites·15 claims
- 3263US2021404058A1Apparatus and methods to reduce particles in a film deposition chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3363US2025305130A1Ultrasonic Assisted Decomposition SystemAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3457US12408239B2PBN heaters for ALD temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Sep 2, 2025·0 cites·14 claims
- 3557US2025037978A1Gas distribution assemblies for semiconductor devicesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3656US2015376786A1Apparatus And Methods For Carousel Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2014·Application pending·0 cites
- 3755US11976363B2Purge ring for pedestal assemblyAPPLIED MATERIALS INC·Filed 2021·Granted May 7, 2024·0 cites·15 claims
- 3855US8459293B2Ampoule with integrated hybrid valveGRIFFIN KEVIN S·Filed 2010·Granted Jun 11, 2013·1 cites·17 claims
- 3955US2021262092A1Sequential pulse and purge for ald processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4053US12084771B2Control of liquid delivery in auto-refill systemsAPPLIED MATERIALS INC·Filed 2021·Granted Sep 10, 2024·0 cites·11 claims
- 4150US2013032085A1Plasma assisted hvpe chamber designAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 4249US2017306490A1Enhanced Spatial ALD Of Metals Through Controlled Precursor MixingAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4349US2013087093A1Apparatus and method for hvpe processing using a plasmaOLGADO DONALD J K·Filed 2012·Application pending·0 cites
- 4448US10508340B2Atmospheric lid with rigid plate for carousel processing chambersAPPLIED MATERIALS INC·Filed 2014·Granted Dec 17, 2019·0 cites·19 claims
- 4547US11577946B2Fail-safe pneumatic lift systemAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 4646US9663859B2Intelligent hardstop for gap detection and control mechanismAPPLIED MATERIALS INC·Filed 2016·Granted May 30, 2017·0 cites·9 claims
- 4746US2017051407A1Heating Source For Spatial Atomic Layer DepositionAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 4846US2011030615A1Method and apparatus for dry cleaning a cooled showerheadAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4945US2020256228A1Vacuum Pumps For Single And Multi-Process Chamber Flow Stream SharingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 5045US2015147889A1Tilted Plate For Batch Processing And Methods Of UseAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
Showing the top 50 of 57 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →