Inventor · disambiguated record
Kenichi Hanawa
Also filed as: HANAWA KENICHI
3 granted patents·2 pending applications·22 citations·filing 2007–2018
69Inventor score
Top patents by PatentIndex Score
5 records- 0189US10861678B2Plasma etching apparatus and methodTOKYO ELECTRON LTD·Filed 2018·Granted Dec 8, 2020·4 cites·15 claims
- 0288US8852385B2Plasma etching apparatus and methodKOSHIISHI AKIRA·Filed 2007·Granted Oct 7, 2014·12 cites·17 claims
- 0387US10229815B2Plasma etching apparatus and methodTOKYO ELECTRON LTD·Filed 2014·Granted Mar 12, 2019·6 cites·14 claims
- 0439US2012312473A1High frequency power distribution device and substrate processing apparatus using sameHANAWA KENICHI·Filed 2012·Application pending·0 cites
- 0538US2013119863A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →