Inventor · disambiguated record
Ken Kaung Lai
Also filed as: LAI KEN · LAI KEN K · LAI KEN K K · LAI KEN KAUNG
23 granted patents·6 pending applications·1,594 citations·filing 1997–2014
97Inventor score
Top patents by PatentIndex Score
29 records- 0198US6461435B1Showerhead with reduced contact areaAPPLIED MATERIALS INC·Filed 2000·Granted Oct 8, 2002·600 cites·22 claims
- 0297US7465665B2Method for depositing tungsten-containing layers by vapor deposition techniquesAPPLIED MATERIALS INC·Filed 2007·Granted Dec 16, 2008·43 cites·20 claims
- 0397US7405158B2Methods for depositing tungsten layers employing atomic layer deposition techniquesAPPLIED MATERIALS INC·Filed 2005·Granted Jul 29, 2008·105 cites·29 claims
- 0497US7211144B2Pulsed nucleation deposition of tungsten layersAPPLIED MATERIALS INC·Filed 2002·Granted May 1, 2007·161 cites·25 claims
- 0596US7745333B2Methods for depositing tungsten layers employing atomic layer deposition techniquesAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·47 cites·15 claims
- 0696US7709385B2Method for depositing tungsten-containing layers by vapor deposition techniquesAPPLIED MATERIALS INC·Filed 2008·Granted May 4, 2010·33 cites·20 claims
- 0796US7695563B2Pulsed deposition process for tungsten nucleationAPPLIED MATERIALS INC·Filed 2007·Granted Apr 13, 2010·38 cites·30 claims
- 0896US7605083B2Formation of composite tungsten filmsAPPLIED MATERIALS INC·Filed 2008·Granted Oct 20, 2009·39 cites·25 claims
- 0996US7220673B2Method for depositing tungsten-containing layers by vapor deposition techniquesAPPLIED MATERIALS INC·Filed 2006·Granted May 22, 2007·29 cites·38 claims
- 1096US6939804B2Formation of composite tungsten filmsAPPLIED MATERIALS INC·Filed 2002·Granted Sep 6, 2005·116 cites·61 claims
- 1195US6797340B2Method for depositing refractory metal layers employing sequential deposition techniquesAPPLIED MATERIALS INC·Filed 2002·Granted Sep 28, 2004·167 cites·20 claims
- 1294US7101795B1Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layerAPPLIED MATERIALS INC·Filed 2000·Granted Sep 5, 2006·50 cites·14 claims
- 1394US7085616B2Atomic layer deposition apparatusAPPLIED MATERIALS INC·Filed 2001·Granted Aug 1, 2006·42 cites·39 claims
- 1492US8027746B2Atomic layer deposition apparatusAPPLIED MATERIALS INC·Filed 2010·Granted Sep 27, 2011·4 cites·15 claims
- 1592US7384867B2Formation of composite tungsten filmsAPPLIED MATERIALS INC·Filed 2005·Granted Jun 10, 2008·16 cites·48 claims
- 1692US6328808B1Apparatus and method for aligning and controlling edge deposition on a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Dec 11, 2001·44 cites·16 claims
- 1789US7860597B2Atomic layer deposition apparatusAPPLIED MATERIALS INC·Filed 2009·Granted Dec 28, 2010·5 cites·19 claims
- 1888US8626330B2Atomic layer deposition apparatusCHIN BARRY L·Filed 2011·Granted Jan 7, 2014·4 cites·14 claims
- 1986US7660644B2Atomic layer deposition apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Feb 9, 2010·4 cites·10 claims
- 2084US9031685B2Atomic layer deposition apparatusAPPLIED MATERIALS INC·Filed 2014·Granted May 12, 2015·1 cites·19 claims
- 2180US10049881B2Method and apparatus for selective nitridation processROGERS MATTHEW S·Filed 2012·Granted Aug 14, 2018·4 cites·7 claims
- 2278US6186092B1Apparatus and method for aligning and controlling edge deposition on a substrateAPPLIED MATERIALS INC·Filed 1997·Granted Feb 13, 2001·39 cites·32 claims
- 2348US2006040052A1Methods for depositing tungsten layers employing atomic layer deposition techniquesFANG HONGBIN·Filed 2003·Application pending·0 cites
- 2448US2004247788A1Method for depositing refractory metal layers employing sequential deposition techniquesFiled 2004·Application pending·0 cites
- 2544US2004209465A1Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layerAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2643US2004013803A1Formation of titanium nitride films using a cyclical deposition processAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 2737US2003123216A1Deposition of tungsten for the formation of conformal tungsten silicideFiled 2001·Application pending·0 cites
- 2836US6210483B1Anti-notch thinning heaterAPPLIED MATERIALS INC·Filed 1998·Granted Apr 3, 2001·3 cites·20 claims
- 2936US2007009658A1Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD processYOO JONG H·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →