Inventor · disambiguated record
Keane Michael Levy
Also filed as: LEVY KEANE MICHAEL
2 granted patents·5 pending applications·0 citations·filing 2019–2024
26Inventor score
Top patents by PatentIndex Score
7 records- 0160US2024419089A1Apparatus for and method of lithography support cleaningASML HOLDING NV·Filed 2024·Application pending·0 cites
- 0248US2025069932A1Object holder, lithographic apparatus comprising such object holder and methods for an object holderASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0347US12117737B2Apparatus and method for cleaning a support structure in a lithographic systemASML HOLDING NV·Filed 2019·Granted Oct 15, 2024·0 cites·12 claims
- 0445US2025021024A1Utility stage for photolithographic apparatus and methodASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0542US11953838B2Lithography support cleaning with cleaning substrate having controlled geometry and compositionASML HOLDING NV·Filed 2019·Granted Apr 9, 2024·0 cites·29 claims
- 0640US2024176254A1Clamp electrode modification for improved overlayASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0731US2023359118A1Systems and methods for forming structures on a surfaceASML HOLDING NV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →