Inventor · disambiguated record
Ken Lucchesi
Also filed as: LUCCHESI KEN
5 granted patents·1 pending application·74 citations·filing 2011–2021
81Inventor score
Technology areasH01J
Top patents by PatentIndex Score
6 records- 0194US9401264B2Control of impedance of RF delivery pathLAM RES CORP·Filed 2013·Granted Jul 26, 2016·22 cites·28 claims
- 0294US9337000B2Control of impedance of RF return pathLAM RES CORP·Filed 2013·Granted May 10, 2016·32 cites·30 claims
- 0393US10249476B2Control of impedance of RF return pathLAM RES CORP·Filed 2016·Granted Apr 2, 2019·12 cites·20 claims
- 0489US10157730B2Control of impedance of RF delivery pathLAM RES CORP·Filed 2016·Granted Dec 18, 2018·6 cites·19 claims
- 0567US8872525B2System, method and apparatus for detecting DC bias in a plasma processing chamberMARAKHTANOV ALEXEI·Filed 2011·Granted Oct 28, 2014·2 cites·19 claims
- 0651US2023298866A1Plasma uniformity control using a static magnetic fieldLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →