Inventor · disambiguated record
Kevin M. Monahan
Also filed as: MONAHAN KEVIN M
32 granted patents·516 citations·filing 1990–2020
98Inventor score
Top patents by PatentIndex Score
32 records- 0197US10026589B1Alignment and registration targets for charged particle beam substrate patterning and inspectionMULTIBEAM CORP·Filed 2017·Granted Jul 17, 2018·21 cites·37 claims
- 0297US10020200B1Patterned atomic layer etching and deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jul 10, 2018·12 cites·15 claims
- 0397US9556521B1Precision deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jan 31, 2017·14 cites·29 claims
- 0497US9478395B1Alignment and registration targets for multiple-column charged particle beam lithography and inspectionMULTIBEAM CORP·Filed 2014·Granted Oct 25, 2016·28 cites·40 claims
- 0597US9466464B1Precision substrate material removal using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Oct 11, 2016·12 cites·31 claims
- 0697US9453281B1Precision deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Sep 27, 2016·16 cites·33 claims
- 0796US9881817B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2016·Granted Jan 30, 2018·11 cites·29 claims
- 0896US9673114B1Precision substrate material removal using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jun 6, 2017·11 cites·28 claims
- 0996US9595419B1Alignment and registration targets for multiple-column charged particle beam lithography and inspectionMULTIBEAM CORP·Filed 2014·Granted Mar 14, 2017·18 cites·45 claims
- 1096US9207539B1Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systemsMULTIBEAM CORP·Filed 2015·Granted Dec 8, 2015·13 cites·21 claims
- 1195US9824859B1Precision material modification using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Nov 21, 2017·8 cites·20 claims
- 1295US9184027B1Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield rampMULTIBEAM CORP·Filed 2015·Granted Nov 10, 2015·10 cites·14 claims
- 1395US8999627B1Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield rampMULTIBEAM CORP·Filed 2014·Granted Apr 7, 2015·15 cites·24 claims
- 1494US10523433B1Secure intra-chip hardware micro-segmentation using charged particle beam processingMULTIBEAM CORP·Filed 2017·Granted Dec 31, 2019·12 cites·28 claims
- 1594US10020166B1Alignment and registration targets for charged particle beam substrate patterning and inspectionMULTIBEAM CORP·Filed 2017·Granted Jul 10, 2018·8 cites·16 claims
- 1693US10341108B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2016·Granted Jul 2, 2019·6 cites·19 claims
- 1793US9620332B1Charged particle beam substrate inspection using both vector and raster scanningMULTIBEAM CORP·Filed 2015·Granted Apr 11, 2017·14 cites·8 claims
- 1893US8999628B1Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systemsMULTIBEAM CORP·Filed 2014·Granted Apr 7, 2015·10 cites·24 claims
- 1992US9466463B1Charged particle beam substrate inspection using both vector and raster scanningMUTIBEAM CORP·Filed 2013·Granted Oct 11, 2016·29 cites·13 claims
- 2092US5869833AElectron beam dose control for scanning electron microscopy and critical dimension measurement instrumentsKLA TENCOR CORP·Filed 1997·Granted Feb 9, 1999·78 cites·18 claims
- 2191US9822443B1Precision material modification using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2016·Granted Nov 21, 2017·4 cites·18 claims
- 2287US10607845B1Patterned atomic layer etching and deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2018·Granted Mar 31, 2020·2 cites·25 claims
- 2383US5493116ADetection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devicesMETROLOGIX INC·Filed 1993·Granted Feb 20, 1996·57 cites·10 claims
- 2481US5302828AScanning techniques in particle beam devices for reducing the effects of surface charge accumulationMETROLOGIX CORP·Filed 1992·Granted Apr 12, 1994·40 cites·8 claims
- 2576US6211518B1Electron beam dose control for scanning electron microscopy and critical dimension measurement instrumentsKLA TENCOR CORP·Filed 1998·Granted Apr 3, 2001·25 cites·21 claims
- 2675US10659229B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2019·Granted May 19, 2020·1 cites·3 claims
- 2771US11037756B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2020·Granted Jun 15, 2021·0 cites·30 claims
- 2871US5155359AAtomic scale calibration systemMETROLOGIX INC·Filed 1991·Granted Oct 13, 1992·23 cites·15 claims
- 2967US10658153B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2019·Granted May 19, 2020·0 cites·21 claims
- 3062US10734192B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2017·Granted Aug 4, 2020·0 cites·19 claims
- 3162US4972072ASystem for detecting a film layer on an objectTRITEC IND INC·Filed 1990·Granted Nov 20, 1990·18 cites·6 claims
- 3258US11063756B1Secure intra-chip hardware micro-segmentation using charged particle beam processingMULTIBEAM CORP·Filed 2019·Granted Jul 13, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →