Inventor · disambiguated record
Kei Nara
Also filed as: NARA KEI
42 granted patents·4 pending applications·717 citations·filing 1994–2020
98Inventor score
Top patents by PatentIndex Score
46 records- 0197US9086585B2Display element manufacturing method and manufacturing apparatusHAMADA TOMOHIDE·Filed 2010·Granted Jul 21, 2015·69 cites·11 claims
- 0290US6204912B1Exposure method, exposure apparatus, and maskNIKON CORP·Filed 1997·Granted Mar 20, 2001·90 cites·22 claims
- 0387US8432528B2Method for manufacturing display element, manufacturing apparatus of display element and display deviceNARA KEI·Filed 2010·Granted Apr 30, 2013·5 cites·18 claims
- 0485US5602620AScanning exposure apparatus and exposure methodNIKON CORP·Filed 1995·Granted Feb 11, 1997·63 cites·14 claims
- 0584US5617211AExposure apparatusNIKON CORP·Filed 1995·Granted Apr 1, 1997·60 cites·19 claims
- 0679US10246287B2Processing system and device manufacturing methodNIKON CORP·Filed 2015·Granted Apr 2, 2019·2 cites·11 claims
- 0779US8917378B2Exposure method, exposure apparatus, and method for producing device with plurality of projection optical systems and pattern having first partial pattern area and second partial area having overlaid area with first partial pattern areaNARA KEI·Filed 2008·Granted Dec 23, 2014·5 cites·30 claims
- 0879US5912726AProjection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination systemNIKON CORP·Filed 1997·Granted Jun 15, 1999·47 cites·31 claims
- 0978US5760881AExposure apparatus with light shielding portion for plotosensitive elementsNIKON CORP·Filed 1995·Granted Jun 2, 1998·42 cites·11 claims
- 1076US5523841ADistance measuring apparatus using multiple switched interferometersNIKON CORP·Filed 1994·Granted Jun 4, 1996·29 cites·12 claims
- 1175US5777722AScanning exposure apparatus and methodNIKON CORP·Filed 1996·Granted Jul 7, 1998·39 cites·34 claims
- 1274US5973766AExposure method and exposure deviceNIKON CORP·Filed 1997·Granted Oct 26, 1999·34 cites·30 claims
- 1374US5850279AAlignment method, projection exposure method, and projection exposure apparatusNIKON CORP·Filed 1996·Granted Dec 15, 1998·37 cites·29 claims
- 1472US8926387B2Defect detection method of display device and defect detection apparatus of display deviceNIKON CORP·Filed 2012·Granted Jan 6, 2015·1 cites·17 claims
- 1572US5668624AScan type exposure apparatusNIKON CORP·Filed 1994·Granted Sep 16, 1997·24 cites·20 claims
- 1671US6437354B1Exposure method and scanning-type exposure apparatusNIKON CORP·Filed 2000·Granted Aug 20, 2002·11 cites·20 claims
- 1769US9172063B2Method and apparatus for manufacturing display devicesHAMADA TOMOHIDE·Filed 2008·Granted Oct 27, 2015·2 cites·12 claims
- 1869US6239861B1Exposure method and scanning type exposure apparatusNIKON CORP·Filed 2000·Granted May 29, 2001·10 cites·18 claims
- 1967US5623343AExposure method and apparatusNIKON CORP·Filed 1995·Granted Apr 22, 1997·27 cites·23 claims
- 2065US5849441AAlignment method utilizing plurality of marks, discriminable from each other, capable of effecting alignment individuallyNIKON CORP·Filed 1997·Granted Dec 15, 1998·20 cites·7 claims
- 2162US2020270087A1Processing system and device manufacturing methodNIKON CORP·Filed 2020·Application pending·0 cites
- 2261US10683185B2Processing system and device manufacturing methodNIKON CORP·Filed 2019·Granted Jun 16, 2020·0 cites·14 claims
- 2361US6341011B1Exposure methodNIKON CORP·Filed 2000·Granted Jan 22, 2002·5 cites·14 claims
- 2459US10832977B2Display element manufacturing method and manufacturing apparatusNIKON CORP·Filed 2018·Granted Nov 10, 2020·0 cites·5 claims
- 2559US9310656B2Method for manufacturing display element, manufacturing apparatus of display element and display deviceNIKON CORP·Filed 2013·Granted Apr 12, 2016·0 cites·11 claims
- 2659US6141082AAlignment method, exposure method, and exposure apparatusNIKON CORP·Filed 1998·Granted Oct 31, 2000·16 cites·20 claims
- 2753US9917023B2Display element manufacturing method and manufacturing apparatusNIKON CORP·Filed 2015·Granted Mar 13, 2018·0 cites·7 claims
- 2853US9178155B2Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display elementNARA KEI·Filed 2009·Granted Nov 3, 2015·0 cites·19 claims
- 2953US8301289B2Defect detection method of display device and defect detection apparatus of display deviceNARA KEI·Filed 2010·Granted Oct 30, 2012·0 cites·11 claims
- 3052US8456617B2Exposure method, exposure device, and micro device manufacturing methodNARA KEI·Filed 2009·Granted Jun 4, 2013·0 cites·18 claims
- 3150US5978094AAlignment device and method based on imaging characteristics of the image pickup systemNIKON CORP·Filed 1997·Granted Nov 2, 1999·16 cites·30 claims
- 3248US10438814B2Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transferNIKON CORP·Filed 2017·Granted Oct 8, 2019·0 cites·13 claims
- 3348US5726757AAlignment methodNIKON CORP·Filed 1996·Granted Mar 10, 1998·11 cites·18 claims
- 3447US6049372AExposure apparatusNIKON CORP·Filed 1997·Granted Apr 11, 2000·10 cites·37 claims
- 3547US2008266539A1Exposure system, device production system, exposure method, and device production methodNIKON CORP·Filed 2008·Application pending·0 cites
- 3646US6342943B1Exposure apparatusNIKON CORP·Filed 1998·Granted Jan 29, 2002·8 cites·22 claims
- 3745US2018066361A1Thin film manufacturing device and thin film manufacturing methodNIKON CORP·Filed 2017·Application pending·0 cites
- 3844US8262974B2Method for manufacturing display element and manufacturing apparatus of display elementNARA KEI·Filed 2010·Granted Sep 11, 2012·0 cites·20 claims
- 3944US5793472AExposure method using reference marks on both the mask and the substrate and capable of providing high alignment precision even after multiple exposuresNIKON CORP·Filed 1997·Granted Aug 11, 1998·9 cites·25 claims
- 4044US2013078389A1Pattern formation methodNARA KEI·Filed 2012·Application pending·0 cites
- 4143USRE37762EScanning exposure apparatus and exposure methodNIPPON KOGAKU KK·Filed 1999·Granted Jun 25, 2002·8 cites·44 claims
- 4242US5985496AExposure method and apparatusNIKON CORPORATIOIN·Filed 1997·Granted Nov 16, 1999·8 cites·18 claims
- 4339US8349672B2Display element manufacturing method and manufacturing apparatus, thin film transistor manufacturing method and manufacturing apparatus, and circuit forming apparatusNIKON CORP·Filed 2010·Granted Jan 8, 2013·0 cites·17 claims
- 4437US5565988AAlignment method and apparatusNIKON CORP·Filed 1995·Granted Oct 15, 1996·5 cites·8 claims
- 4536US5838449AOptical apparatusNIKON CORP·Filed 1997·Granted Nov 17, 1998·4 cites·21 claims
- 4629USH1733HExposure methodNIPPON KOGAKU KK·Filed 1995·Granted Jun 2, 1998·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →