Inventor · disambiguated record
Kenichi Oyama
Also filed as: OYAMA KENICHI
16 granted patents·13 pending applications·350 citations·filing 1993–2024
92Inventor score
Files withTOKYO ELECTRON LTD11NEC CORP5MITSUBISHI HEAVY IND LTD3OYAMA KENICHI3TEL MFG AND ENGINEERING OF AMERICA INC2
Top patents by PatentIndex Score
29 records- 0196US5929479AFloating gate type non-volatile semiconductor memory for storing multi-value informationNEC CORP·Filed 1997·Granted Jul 27, 1999·249 cites·20 claims
- 0293US9418860B2Use of topography to direct assembly of block copolymers in grapho-epitaxial applicationsTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·12 cites·20 claims
- 0387US11694872B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 4, 2023·1 cites·22 claims
- 0479US11444511B2Vibration damping device and electrically driven actuatorMITSUBISHI HEAVY IND LTD·Filed 2019·Granted Sep 13, 2022·2 cites·9 claims
- 0573US5691552ANonvolatile semiconductor memory formed with silicon-on-insulator structureNEC CORP·Filed 1995·Granted Nov 25, 1997·35 cites·15 claims
- 0671US9023225B2Pattern forming methodTOKYO ELECTRON LTD·Filed 2013·Granted May 5, 2015·2 cites·11 claims
- 0770US8383990B2Substrate transport apparatus and heat treatment apparatusSOKUDO CO LTD·Filed 2008·Granted Feb 26, 2013·3 cites·11 claims
- 0869US10211050B2Method for photo-lithographic processing in semiconductor device manufacturingTOKYO ELECTRON LTD·Filed 2016·Granted Feb 19, 2019·1 cites·4 claims
- 0969US7094994B2Heat treatment apparatus and method of semiconductor waferSONY CORP·Filed 2004·Granted Aug 22, 2006·13 cites·9 claims
- 1068US11450506B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Sep 20, 2022·0 cites·22 claims
- 1165US5327385AMethod of erasure for a non-volatile semiconductor memory deviceNEC CORP·Filed 1993·Granted Jul 5, 1994·25 cites·10 claims
- 1263US2025092514A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1354US12165848B2Substrate processing method, substrate processing apparatus, and method for producing nanowire or nanosheet transistorTOKYO ELECTRON LTD·Filed 2020·Granted Dec 10, 2024·0 cites·20 claims
- 1445US2016049292A1Semiconductor Device Manufacturing MethodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 1543US10317797B2Pattern forming method for forming a patternTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·0 cites·6 claims
- 1643US2014083972A1Pattern forming methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1743US2014235065A1Method of manufacturing semiconductor device and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1843US2020350803A1ActuatorMITSUBISHI HEAVY IND LTD·Filed 2019·Application pending·0 cites
- 1943US2021039771A1Actuator and aircraft control surface drive systemMITSUBISHI HEAVY IND LTD·Filed 2019·Application pending·0 cites
- 2041US9459535B2Method of forming patternTOKYO OHKA KOGYO CO LTD·Filed 2013·Granted Oct 4, 2016·0 cites·7 claims
- 2141US2014162428A1Method for fabricating phase change memoryTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2240US6013552AMethod of manufacturing a split-gate flash memory cellNEC CORP·Filed 1998·Granted Jan 11, 2000·7 cites·12 claims
- 2339US2012211873A1Method for forming a pattern and semiconductor deviceOYAMA KENICHI·Filed 2012·Application pending·0 cites
- 2437US2013040463A1Method and apparatus for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 2537US2012028471A1Method of manufacturing a semiconductor deviceOYAMA KENICHI·Filed 2011·Application pending·0 cites
- 2634US2004241596A1Method of forming resist patterns and method of producing semiconductor deviceFiled 2004·Application pending·0 cites
- 2734US2012220132A1Semiconductor device manufacturing methodOYAMA KENICHI·Filed 2012·Application pending·0 cites
- 2834US2017262044A1Information processing device, information processing method, and recording mediumNEC CORP·Filed 2015·Application pending·0 cites
- 2933US8687405B2Phase change memory and method for fabricating phase change memoryNAKABAYASHI HAJIME·Filed 2012·Granted Apr 1, 2014·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →