Inventor · disambiguated record
Kerstin Purrucker
Also filed as: PURRUCKER KERSTIN
6 granted patents·18 citations·filing 2015–2021
77Inventor score
Top patents by PatentIndex Score
6 records- 0195US9921104B2Simultaneous multi-angle spectroscopyKLA TENCOR CORP·Filed 2016·Granted Mar 20, 2018·9 cites·21 claims
- 0286US9915524B2Optical metrology with small illumination spot sizeKLA TENCOR CORP·Filed 2015·Granted Mar 13, 2018·3 cites·20 claims
- 0384US10648796B2Optical metrology with small illumination spot sizeKLA TENCOR CORP·Filed 2018·Granted May 12, 2020·3 cites·13 claims
- 0483US10690602B2Methods and systems for measurement of thick films and high aspect ratio structuresKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·3 cites·22 claims
- 0562US11119050B2Methods and systems for measurement of thick films and high aspect ratio structuresKLA CORP·Filed 2020·Granted Sep 14, 2021·0 cites·20 claims
- 0652US12013355B2Methods and systems for compact, small spot size soft x-ray scatterometryKLA CORP·Filed 2021·Granted Jun 18, 2024·0 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →