Inventor · disambiguated record
Kenichi Suematsu
Also filed as: SUEMATSU KENICHI
16 granted patents·1 pending application·327 citations·filing 2004–2018
93Inventor score
Top patents by PatentIndex Score
17 records- 0198US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 0297US7928382B2Detector and inspecting apparatusEBARA CORP·Filed 2006·Granted Apr 19, 2011·51 cites·22 claims
- 0397US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 0497US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 0594US8946631B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·11 cites·14 claims
- 0693US7425703B2Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation methodEBARA CORP·Filed 2005·Granted Sep 16, 2008·16 cites·3 claims
- 0786US9406480B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2015·Granted Aug 2, 2016·3 cites·14 claims
- 0883US8742341B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusNOJI NOBUHARU·Filed 2010·Granted Jun 3, 2014·4 cites·13 claims
- 0976US10074510B2Inspection system and inspection image data generation methodEBARA CORP·Filed 2014·Granted Sep 11, 2018·3 cites·5 claims
- 1073US8431892B2Detector and inspecting apparatusHATAKEYAMA MASAHIRO·Filed 2010·Granted Apr 30, 2013·2 cites·26 claims
- 1168US8796621B2Detector and inspecting apparatusEBARA CORP·Filed 2013·Granted Aug 5, 2014·1 cites·18 claims
- 1260US2008315095A1Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation methodEBARA CORP·Filed 2008·Application pending·0 cites
- 1350US9105445B2Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recordedEBARA CORP·Filed 2014·Granted Aug 11, 2015·0 cites·19 claims
- 1448US10002740B2Inspection deviceEBARA CORP·Filed 2017·Granted Jun 19, 2018·0 cites·13 claims
- 1546US10446404B2Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatusEBARA CORP·Filed 2018·Granted Oct 15, 2019·0 cites·7 claims
- 1644US9852878B2Surface processing apparatusEBARA CORP·Filed 2015·Granted Dec 26, 2017·0 cites·8 claims
- 1735US9760984B2Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unitEBARA CORP·Filed 2015·Granted Sep 12, 2017·0 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when Kenichi Suematsu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →