Inventor · disambiguated record
Keiichi Tohyama
Also filed as: TOHYAMA KEIICHI
9 granted patents·1 pending application·478 citations·filing 1995–2015
91Inventor score
Top patents by PatentIndex Score
10 records- 0198US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 0297US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 0397US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 0497US5672091APolishing apparatus having endpoint detection deviceEBARA CORP·Filed 1995·Granted Sep 30, 1997·212 cites·12 claims
- 0594US8946631B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·11 cites·14 claims
- 0686US9406480B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2015·Granted Aug 2, 2016·3 cites·14 claims
- 0783US8742341B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusNOJI NOBUHARU·Filed 2010·Granted Jun 3, 2014·4 cites·13 claims
- 0883US7403279B2Information recording medium examining apparatus and methodEBARA CORP·Filed 2005·Granted Jul 22, 2008·5 cites·10 claims
- 0969US7176459B2Electron beam apparatusEBARA CORP·Filed 2004·Granted Feb 13, 2007·7 cites·12 claims
- 1040US2005194535A1Sample surface inspection method and inspection systemEBARA CORP·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →