Inventor · disambiguated record
Kenichi Yanagitani
Also filed as: YANAGITANI KENICHI
1 granted patent·3 pending applications·7 citations·filing 2003–2009
31Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0177US7854962B2Gas supply method using a gas supply systemTOKYO ELECTRON LTD·Filed 2009·Granted Dec 21, 2010·7 cites·9 claims
- 0243US2011265725A1Film deposition device and substrate processing deviceTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0338US2007163713A1Gas supply system and processing systemKASAI SHIGERU·Filed 2003·Application pending·0 cites
- 0435US2005189074A1Gas processing apparatus and method and computer storage medium storing program for controlling sameTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →