Inventor · disambiguated record
Kiyotaka Ishibashi
Also filed as: ISHIBASHI KIYOTAKA
31 granted patents·18 pending applications·387 citations·filing 1989–2020
96Inventor score
Top patents by PatentIndex Score
49 records- 0194US9767993B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Sep 19, 2017·18 cites·34 claims
- 0294US4940015APlasma reactor for diamond synthesisKOBE STEEL LTD·Filed 1989·Granted Jul 10, 1990·109 cites·9 claims
- 0393US9418822B2Plasma processing apparatus, plasma processing method and high frequency generatorTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·29 cites·12 claims
- 0493US8372200B2Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing methodTOKYO ELECTRON LTD·Filed 2007·Granted Feb 12, 2013·14 cites·7 claims
- 0592US5063294AConverged ion beam apparatusKOBE STEEL LTD·Filed 1990·Granted Nov 5, 1991·95 cites·19 claims
- 0682US7469654B2Plasma processing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Dec 30, 2008·22 cites·42 claims
- 0781US8925351B2Manufacturing method of top plate of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jan 6, 2015·5 cites·6 claims
- 0880US9237638B2Plasma processing apparatus and substrate processing methodISHIBASHI KIYOTAKA·Filed 2010·Granted Jan 12, 2016·4 cites·8 claims
- 0977US9177846B2Placing bed structure, treating apparatus using the structure, and method for using the apparatusKAWAMURA KOHEI·Filed 2008·Granted Nov 3, 2015·5 cites·9 claims
- 1077US8915999B2Shower plate sintered integrally with gas release hole member and method for manufacturing the sameOKESAKU MASAHIRO·Filed 2007·Granted Dec 23, 2014·4 cites·5 claims
- 1175US8967080B2Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing methodTIAN CAIZHONG·Filed 2009·Granted Mar 3, 2015·10 cites·8 claims
- 1275US8343308B2Ceiling plate and plasma process apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jan 1, 2013·4 cites·6 claims
- 1375US8267042B2Plasma processing apparatus and plasma processing methodISHIBASHI KIYOTAKA·Filed 2009·Granted Sep 18, 2012·5 cites·10 claims
- 1472US7930992B2Plasma processing equipmentTOKYO ELECTRON LTD·Filed 2004·Granted Apr 26, 2011·9 cites·13 claims
- 1568US10388557B2Placing bed structure, treating apparatus using the structure, and method for using the apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 20, 2019·1 cites·12 claims
- 1667US9111726B2Plasma processing apparatusMOYAMA KAZUKI·Filed 2012·Granted Aug 18, 2015·2 cites·12 claims
- 1765US7828927B2Plasma processing deviceTOKYO ELECTRON LTD·Filed 2005·Granted Nov 9, 2010·1 cites·13 claims
- 1865US5280252ACharged particle acceleratorKOBE STEEL LTD·Filed 1991·Granted Jan 18, 1994·33 cites·9 claims
- 1965US2017253972A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 2064US2013112337A1Shower plate, manufacturing method of the shower plate, and plasma processing apparatus using the shower plateTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 2163US8419859B2Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning methodFUKIAGE NORIAKI·Filed 2008·Granted Apr 16, 2013·3 cites·8 claims
- 2260US9767994B2Shower plate sintered integrally with gas release hole member and method for manufacturing the sameTOKYO ELECTRON LTD·Filed 2014·Granted Sep 19, 2017·0 cites·10 claims
- 2360US2016093474A1Substrate processing methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 2459US8069704B2Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structureISHIBASHI KIYOTAKA·Filed 2009·Granted Dec 6, 2011·2 cites·21 claims
- 2559US2008254220A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 2658US2015197853A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 2757US7940009B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted May 10, 2011·0 cites·10 claims
- 2857US2010288439A1Top plate and plasma process apparatus employing the sameTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 2955US8273210B2Plasma processing apparatus and method for adjusting plasma density distributionTIAN CAIZHONG·Filed 2008·Granted Sep 25, 2012·0 cites·17 claims
- 3055US2009311869A1Shower plate and manufacturing method thereof, and plasma processing apparatus, plasma processing method and electronic device manufacturing method using the shower plateTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 3153US11692269B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jul 4, 2023·0 cites·9 claims
- 3252US5350920AIon beam analyzing apparatusKOBE STEEL LTD·Filed 1992·Granted Sep 27, 1994·12 cites·7 claims
- 3350US2013081763A1Ceiling plate and plasma process apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 3449US2009266711A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 3549US2009229753A1Method for manufacturing shower plate, shower plate manufactured using the method, and plasma processing apparatus including the shower plateTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 3648US2009183677A1Temperature control device and processing apparatus using the sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 3747US2009194238A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 3845US9670584B2Plasma processing deviceISHIBASHI KIYOTAKA·Filed 2012·Granted Jun 6, 2017·0 cites·14 claims
- 3945US2009286405A1Shower plate, and plasma processing apparatus, plasma processing method and electronic device manufacturing method using the shower plateTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 4044US2005188922A1Plasma processing unitTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 4143US10570512B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 25, 2020·0 cites·21 claims
- 4242US9595425B2Antenna, dielectric window, plasma processing apparatus and plasma processing methodMATSUMOTO NAOKI·Filed 2012·Granted Mar 14, 2017·0 cites·8 claims
- 4342US2006156984A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 4440US7779783B2Plasma processing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Aug 24, 2010·0 cites·12 claims
- 4540US2008190560A1Microwave Plasma Processing ApparatusTIAN CAIZHONG·Filed 2006·Application pending·0 cites
- 4640US2009194236A1Plasma processing equipmentUNIV KYOTO·Filed 2005·Application pending·0 cites
- 4739US8387560B2Plasma processing unitTIAN CAIZHONG·Filed 2005·Granted Mar 5, 2013·0 cites·13 claims
- 4838US8267040B2Plasma processing apparatus and plasma processing methodISHIBASHI KIYOTAKA·Filed 2005·Granted Sep 18, 2012·0 cites·2 claims
- 4936US2012118505A1Plasma processing apparatus and cooling device for plasma processing apparatusISHIBASHI KIYOTAKA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →