Inventor · disambiguated record
Kirill Urievich Sobolev
Also filed as: SOBOLEV KIRILL URIEVICH
3 granted patents·3 pending applications·3 citations·filing 2016–2023
54Inventor score
Top patents by PatentIndex Score
6 records- 0179US11526091B2Sensor apparatus and method for lithographic measurementsASML HOLDING NV·Filed 2020·Granted Dec 13, 2022·1 cites·20 claims
- 0267US10247940B2Objective lens systemASML HOLDING NV·Filed 2016·Granted Apr 2, 2019·2 cites·20 claims
- 0358US12405227B2Method for region of interest processing for reticle particle detectionASML HOLDING NV·Filed 2021·Granted Sep 2, 2025·0 cites·20 claims
- 0456US2025085646A1Systems and methods for generating multiple illumination spots from a single illumination sourceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0554US2025147438A1Inspection apparatus, motorized apertures, and method backgroundASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0645US2022100109A1Apparatus for and method of simultaneously acquiring parallel alignment marksASML HOLDING NV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →