Inventor · disambiguated record
Kiwamu Tsukamoto
Also filed as: TSUKAMOTO KIWAMU
19 granted patents·7 pending applications·2,247 citations·filing 1996–2018
96Inventor score
Top patents by PatentIndex Score
26 records- 0198US5950925AReactant gas ejector headEBARA CORP·Filed 1997·Granted Sep 14, 1999·697 cites·8 claims
- 0298US5728223AReactant gas ejector head and thin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Mar 17, 1998·674 cites·28 claims
- 0397US8497476B2Inspection deviceHATAKEYAMA MASAHIRO·Filed 2012·Granted Jul 30, 2013·42 cites·10 claims
- 0497US6176929B1Thin-film deposition apparatusEBARA CORP·Filed 1998·Granted Jan 23, 2001·340 cites·32 claims
- 0596US6387182B1Apparatus and method for processing substrateEBARA CORP·Filed 2000·Granted May 14, 2002·113 cites·19 claims
- 0695US6419462B1Positive displacement type liquid-delivery apparatusEBARA CORP·Filed 2000·Granted Jul 16, 2002·169 cites·12 claims
- 0792US8742344B2Inspection apparatusEBARA CORP·Filed 2013·Granted Jun 3, 2014·10 cites·9 claims
- 0890US9601302B2Inspection apparatusEBARA CORP·Filed 2015·Granted Mar 21, 2017·5 cites·8 claims
- 0989US5935337AThin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Aug 10, 1999·90 cites·49 claims
- 1087US8624182B2Electro-optical inspection apparatus and method with dust or particle collection functionWATANABE KENJI·Filed 2011·Granted Jan 7, 2014·7 cites·12 claims
- 1186US10157722B2Inspection deviceEBARA CORP·Filed 2016·Granted Dec 18, 2018·3 cites·15 claims
- 1283US9134261B2Inspection apparatusEBARA CORP·Filed 2014·Granted Sep 15, 2015·4 cites·2 claims
- 1381US6022413AThin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Feb 8, 2000·40 cites·12 claims
- 1473US6116267AValving deviceEBARA CORP·Filed 1998·Granted Sep 12, 2000·29 cites·6 claims
- 1570US8946629B2Inspection apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·1 cites·10 claims
- 1664US2015097116A1Inspection apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 1762US5950646AVapor feed supply systemEBARA CORP·Filed 1998·Granted Sep 14, 1999·23 cites·31 claims
- 1860US2014014848A1Inspection deviceEBARA CORP·Filed 2013·Application pending·0 cites
- 1958US2008220621A1Substrate treatment apparatus and substrate treatment methodTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 2056US9105444B2Electro-optical inspection apparatus and method with dust or particle collection functionEBARA CORP·Filed 2013·Granted Aug 11, 2015·0 cites·8 claims
- 2151US2007092651A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 2251US2007092646A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 2351US2007095791A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 2449US2006169208A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 2546US10446404B2Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatusEBARA CORP·Filed 2018·Granted Oct 15, 2019·0 cites·7 claims
- 2644US9852878B2Surface processing apparatusEBARA CORP·Filed 2015·Granted Dec 26, 2017·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →