Inventor · disambiguated record
Knut Beekmann
Also filed as: BEEKMANN KNUT
4 granted patents·2 pending applications·5 citations·filing 1992–2004
62Inventor score
Files withAVIZA EUROP LTD1AVIZA TECHNOLOGY LTD1CUNNANE LIAM JOSEPH1ELECTROTECH EQUIPMENTS LTD1TOKYO ELECTRON LTD1
Top patents by PatentIndex Score
6 records- 0144US7309662B1Method and apparatus for forming a film on a substrateAVIZA EUROP LTD·Filed 2000·Granted Dec 18, 2007·3 cites·28 claims
- 0237US7923383B2Method and apparatus for treating a semi-conductor substrateTOKYO ELECTRON LTD·Filed 2003·Granted Apr 12, 2011·2 cites·18 claims
- 0335US7202167B2Method of forming a diffusion barrierAVIZA TECHNOLOGY LTD·Filed 2004·Granted Apr 10, 2007·0 cites·20 claims
- 0429US2003118845A1Diffusion barrierFiled 2002·Application pending·0 cites
- 0527US2004217346A1Method of deposting a dielectric filmCUNNANE LIAM JOSEPH·Filed 2002·Application pending·0 cites
- 0613US5492737ADeposition apparatus and methodELECTROTECH EQUIPMENTS LTD·Filed 1992·Granted Feb 20, 1996·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →