Inventor · disambiguated record
Koei Aida
Also filed as: AIDA KOEI
3 granted patents·7 pending applications·524 citations·filing 2008–2024
71Inventor score
Top patents by PatentIndex Score
10 records- 0193US8845806B2Shower plate having different aperture dimensions and/or distributionsAIDA KOEI·Filed 2010·Granted Sep 30, 2014·520 cites·16 claims
- 0262US2024150898A1Chamber liner for substrate processing apparatusASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0361US2024117492A1Liquid-source precursor delivery system apparatus and method of using sameASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0458US12051567B2Gas supply unit and substrate processing apparatus including gas supply unitASM IP HOLDING BV·Filed 2021·Granted Jul 30, 2024·0 cites·16 claims
- 0556US2022367151A1Cvd apparatus and film forming methodASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0655US2023360953A1Wafer support device and film forming apparatusASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0755US2024258085A1Shared exhaust unit and substrate processing apparatus including shared exhaust unitASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0851US2023137026A1Method and system for selectively removing material at an edge of a substrateASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0942USD799646SHeater blockASM IP HOLDING BV·Filed 2016·Granted Oct 10, 2017·4 cites·1 claims
- 1042US2010101491A1Wafer lift pins suspended and supported at underside of susceptorASM JAPAN·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →