Inventor · disambiguated record
Koji Egashira
Also filed as: EGASHIRA KOJI
18 granted patents·1 pending application·193 citations·filing 1989–2016
94Inventor score
Top patents by PatentIndex Score
19 records- 0195US8851819B2Substrate processing apparatusKAMIKAWA YUJI·Filed 2010·Granted Oct 7, 2014·29 cites·3 claims
- 0292US8002511B2Batch forming apparatus, substrate processing system, batch forming method, and storage mediumTOKYO ELECTRON LTD·Filed 2006·Granted Aug 23, 2011·21 cites·29 claims
- 0382US4990550AFiber-reinforced polymer composition and method of producing sameTONEN SEKIYUKAGAKU KK·Filed 1989·Granted Feb 5, 1991·34 cites·18 claims
- 0477US6568412B2Rotary processing apparatus with holding bars having drain groovesTOKYO ELECTRON LTD·Filed 2001·Granted May 27, 2003·21 cites·15 claims
- 0576US6698439B2Processing apparatus with sealing mechanismTOKYO ELECTRON LTD·Filed 2001·Granted Mar 2, 2004·19 cites·24 claims
- 0672US7412981B2Liquid processing apparatus and methodTOKYO ELECTRON LTD·Filed 2006·Granted Aug 19, 2008·3 cites·10 claims
- 0770US5106564AMethod of and apparatus for making fiber-reinforced polymer compositionsTONEN SEKIYUKAGAKU KK·Filed 1991·Granted Apr 21, 1992·27 cites·6 claims
- 0866US9305818B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 5, 2016·1 cites·3 claims
- 0966US6725868B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Apr 27, 2004·10 cites·32 claims
- 1061US8567417B2Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning methodKAMIKAWA YUJI·Filed 2010·Granted Oct 29, 2013·1 cites·6 claims
- 1160US6663721B2Liquid processing apparatus and methodTOKYO ELECTRON LTD·Filed 2001·Granted Dec 16, 2003·7 cites·17 claims
- 1259US6743297B2Rotary substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2002·Granted Jun 1, 2004·7 cites·12 claims
- 1351US7240680B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Jul 10, 2007·3 cites·11 claims
- 1450US7314054B2Liquid processing apparatus with nozzle having planar ejecting orificesTOKYO ELECTRON LTD·Filed 2001·Granted Jan 1, 2008·2 cites·7 claims
- 1548US5106893AFiber-reinforced polymer compositionTONEN SEKIYUKAGAKU KK·Filed 1991·Granted Apr 21, 1992·7 cites·4 claims
- 1644US7347214B2Rotary shaft sealing mechanism and liquid processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Mar 25, 2008·1 cites·18 claims
- 1743US9452452B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 27, 2016·0 cites·18 claims
- 1842US9272310B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 1, 2016·0 cites·19 claims
- 1936US2018240684A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →