Inventor · disambiguated record
Koichi Fukaya
Also filed as: FUKAYA KOICHI
18 granted patents·11 pending applications·199 citations·filing 1981–2024
93Inventor score
Top patents by PatentIndex Score
29 records- 0192US7357699B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2004·Granted Apr 15, 2008·49 cites·34 claims
- 0291US7854646B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2010·Granted Dec 21, 2010·12 cites·7 claims
- 0388US10008380B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2014·Granted Jun 26, 2018·7 cites·26 claims
- 0488US7635292B2Substrate holding device and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 22, 2009·13 cites·13 claims
- 0586US7988537B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2008·Granted Aug 2, 2011·8 cites·12 claims
- 0686US7867063B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2009·Granted Jan 11, 2011·8 cites·20 claims
- 0784US8769842B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2013·Granted Jul 8, 2014·5 cites·16 claims
- 0884US7670206B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2004·Granted Mar 2, 2010·27 cites·10 claims
- 0981US4364169AMethod of producing a stator iron coreNIPPON DENSO CO·Filed 1981·Granted Dec 21, 1982·51 cites·3 claims
- 1074US12205831B2Cleaning apparatus and polishing apparatusEBARA CORP·Filed 2024·Granted Jan 21, 2025·0 cites·12 claims
- 1172US7108592B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2004·Granted Sep 19, 2006·14 cites·17 claims
- 1269US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 1368US10991602B2Substrate washing deviceEBARA CORP·Filed 2017·Granted Apr 27, 2021·1 cites·7 claims
- 1466US2024082885A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2023·Application pending·0 cites
- 1564US7638030B2Electrolytic processing apparatus and electrolytic processing methodEBARA CORP·Filed 2003·Granted Dec 29, 2009·3 cites·24 claims
- 1662US11948811B2Cleaning apparatus and polishing apparatusEBARA CORP·Filed 2020·Granted Apr 2, 2024·0 cites·22 claims
- 1762US2024157922A1Brake deviceDENSO CORP·Filed 2024·Application pending·0 cites
- 1861US2024321601A1Cleaning apparatus, substrate processing apparatus, and cleaning methodEBARA CORP·Filed 2024·Application pending·0 cites
- 1959US2024269720A1Washing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 2058US2022203411A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2021·Application pending·0 cites
- 2156US2024165675A1Substrate cleaning apparatus, substrate processing apparatus, apparatus for cleaning cleaning member, and method for cleaning cleaning memberEBARA CORP·Filed 2023·Application pending·0 cites
- 2255US12370578B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2021·Granted Jul 29, 2025·0 cites·19 claims
- 2351US12220732B2Substrate cleaning system and substrate cleaning methodEBARA CORP·Filed 2020·Granted Feb 11, 2025·0 cites·19 claims
- 2451US2023182262A1Substrate cleaning device and substrate polishing deviceEBARA CORP·Filed 2022·Application pending·0 cites
- 2550US2010154837A1Liquid-scattering prevention cup, substrate processing apparatus and method for operating the apparatusEBARA CORP·Filed 2009·Application pending·0 cites
- 2648US2022016651A1Substrate cleaning devices, substrate processing apparatus, substrate cleaning method, and nozzleEBARA CORP·Filed 2021·Application pending·0 cites
- 2747US12100587B2Substrate cleaning apparatus and cleaning method of substrateEBARA CORP·Filed 2020·Granted Sep 24, 2024·0 cites·18 claims
- 2847US2011289795A1Substrate drying apparatus, substrate drying method and control programISHIBASHI TOMOATSU·Filed 2011·Application pending·0 cites
- 2939US2013167947A1Liquid scattering prevention cup, substrate processing apparatus provided with the cup, and substrate polishing apparatusEBARA CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →