Inventor · disambiguated record
Koen Goorman
Also filed as: GOORMAN KOEN
12 granted patents·123 citations·filing 2004–2020
91Inventor score
Top patents by PatentIndex Score
12 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0295US7304715B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·52 cites·39 claims
- 0394US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0489US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 0588US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 0686US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 0781US7423725B2Lithographic methodASML NETHERLANDS BV·Filed 2006·Granted Sep 9, 2008·5 cites·31 claims
- 0878US7453063B2Calibration substrate and method for calibrating a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Nov 18, 2008·16 cites·45 claims
- 0971US7196768B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 27, 2007·14 cites·12 claims
- 1065US7426011B2Method of calibrating a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 16, 2008·2 cites·25 claims
- 1163US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 1232US10379057B2Illumination system, inspection tool with illumination system, and method of operating an illumination systemKLA TENCOR CORP·Filed 2015·Granted Aug 13, 2019·0 cites·42 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →