Inventor · disambiguated record
Kouji Sogabe
Also filed as: SOGABE KOUJI
1 granted patent·3 pending applications·0 citations·filing 2008–2020
3Inventor score
Top patents by PatentIndex Score
4 records- 0150US2013199572A1Film-forming apparatus, and method for maintaining film-forming apparatusHAYASHI TAKURO·Filed 2011·Application pending·0 cites
- 0242US8357265B2Cleaning method and a vacuum processing apparatusULVAC INC·Filed 2008·Granted Jan 22, 2013·0 cites·4 claims
- 0340US2022056571A1Film Forming MethodULVAC INC·Filed 2020·Application pending·0 cites
- 0438US2011256810A1Method of manufacturing chuck plate for use in electrostatic chuckNANBA TAKAHIRO·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →