Inventor · disambiguated record
Koos Van Berkel
Also filed as: VAN BERKEL KOOS
11 granted patents·3 pending applications·18 citations·filing 2016–2023
84Inventor score
Top patents by PatentIndex Score
14 records- 0190US10955595B2Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 23, 2021·5 cites·18 claims
- 0289US10747127B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 18, 2020·5 cites·26 claims
- 0383US10185224B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Jan 22, 2019·3 cites·20 claims
- 0480US9927722B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Mar 27, 2018·2 cites·26 claims
- 0578US12197139B2Object holder, tool and method of manufacturing an object holderASML NETHERLANDS BV·Filed 2021·Granted Jan 14, 2025·1 cites·20 claims
- 0678US10488765B2Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 26, 2019·2 cites·13 claims
- 0756US12235592B2Object holder, electrostatic sheet and method for making an electrostatic sheetASML NETHERLANDS BV·Filed 2021·Granted Feb 25, 2025·0 cites·14 claims
- 0851US12339592B2Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production processASML NETHERLANDS BV·Filed 2021·Granted Jun 24, 2025·0 cites·25 claims
- 0951US12276918B2Method and apparatus for calculating a spatial map associated with a componentASML NETHERLANDS BV·Filed 2021·Granted Apr 15, 2025·0 cites·13 claims
- 1049US10712673B2Method of determining a property of a structure, inspection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 14, 2020·0 cites·20 claims
- 1148US2024077380A1A method and system for predicting aberrations in a projection systemASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1247US2023176492A1Optical system and method of operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1341US2023315027A1Motion control using an artificial neural networkASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1439US9811001B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 7, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →