Inventor · disambiguated record
Kousuke Yoshihara
Also filed as: YOSHIHARA KOUSUKE
94 granted patents·15 pending applications·1,006 citations·filing 2000–2019
99Inventor score
Top patents by PatentIndex Score
109 records- 0198US9741559B2Film forming method, computer storage medium, and film forming systemTOKYO ELECTRON LTD·Filed 2014·Granted Aug 22, 2017·466 cites·16 claims
- 0293US9256131B2Developing method for developing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 9, 2016·7 cites·6 claims
- 0392US10672606B2Coating film forming method, coating film forming apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Jun 2, 2020·5 cites·13 claims
- 0492US10068763B2Coating film forming method, coating film forming apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Sep 4, 2018·8 cites·6 claims
- 0592US8337104B2Developing apparatus, developing method and storage mediumTAKIGUCHI YASUSHI·Filed 2011·Granted Dec 25, 2012·10 cites·11 claims
- 0691US6527860B1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Mar 4, 2003·49 cites·13 claims
- 0790US9162247B2Coating and development treatment system with airflow control including control unit and movable airflow control plateYOSHIHARA KOUSUKE·Filed 2012·Granted Oct 20, 2015·11 cites·7 claims
- 0890US7802536B2Apparatus and method of forming an applied filmTOKYO ELECTRON LTD·Filed 2006·Granted Sep 28, 2010·15 cites·16 claims
- 0990US6848625B2Process liquid supply mechanism and process liquid supply methodTOKYO ELECTRON LTD·Filed 2003·Granted Feb 1, 2005·58 cites·30 claims
- 1089US10048664B2Coating method, computer storage medium and coating apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 14, 2018·7 cites·11 claims
- 1189US8480319B2Coating and developing apparatus, coating and developing method and non-transitory tangible mediumHAYASHI SHINICHI·Filed 2011·Granted Jul 9, 2013·10 cites·8 claims
- 1288US8043657B2Coating treatment methodTOKYO ELECTRON LTD·Filed 2007·Granted Oct 25, 2011·11 cites·5 claims
- 1388US7901514B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Mar 8, 2011·12 cites·20 claims
- 1487US9846363B2Processing liquid supplying apparatus and method of supplying processing liquidTOKYO ELECTRON LTD·Filed 2014·Granted Dec 19, 2017·7 cites·4 claims
- 1587US8287954B2Apparatus and method of forming an applied filmYOSHIHARA KOUSUKE·Filed 2010·Granted Oct 16, 2012·7 cites·6 claims
- 1687US8026048B2Developing apparatus and developing methodTOKYO ELECTRON LTD·Filed 2010·Granted Sep 27, 2011·7 cites·13 claims
- 1787US6673151B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Jan 6, 2004·32 cites·10 claims
- 1886US7604013B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Oct 20, 2009·11 cites·10 claims
- 1985US11342198B2Processing liquid supplying apparatus and processing liquid supplying methodTOKYO ELECTRON LTD·Filed 2018·Granted May 24, 2022·3 cites·19 claims
- 2085US7820243B2Resist coating method and resist coating apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Oct 26, 2010·9 cites·22 claims
- 2185US6869640B2Coating film forming method and coating film forming apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Mar 22, 2005·28 cites·21 claims
- 2285US6811962B2Method for developing processing and apparatus for supplying developing solutionTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·29 cites·10 claims
- 2384US9613836B2Coating film forming apparatus, coating film forming method, and recording mediumTOKYO ELECTRON LTD·Filed 2014·Granted Apr 4, 2017·6 cites·5 claims
- 2484US9307653B2Substrate cleaning method, substrate cleaning apparatus and storage medium for cleaning substrateTOKYO ELECTRON LTD·Filed 2013·Granted Apr 5, 2016·6 cites·18 claims
- 2582US9217922B2Liquid processing apparatus, liquid processing method and storage medium for liquid processingTOKYO ELECTRON LTD·Filed 2013·Granted Dec 22, 2015·5 cites·6 claims
- 2682US8956694B2Developing apparatus, developing method and storage mediumTAKEGUCHI HIROFUMI·Filed 2010·Granted Feb 17, 2015·4 cites·7 claims
- 2782US8678684B2Developing methodTOKYO ELECTRON LTD·Filed 2013·Granted Mar 25, 2014·4 cites·14 claims
- 2882US8304018B2Coating methodTAKAYANAGI KOJI·Filed 2010·Granted Nov 6, 2012·8 cites·9 claims
- 2982US6709174B2Apparatus and method for developmentTOKYO ELECTRON LTD·Filed 2002·Granted Mar 23, 2004·27 cites·14 claims
- 3081US8865396B2Developing method and developing apparatusTAKEGUCHI HIROFUMI·Filed 2009·Granted Oct 21, 2014·5 cites·13 claims
- 3180US10734251B2Liquid processing apparatus, liquid processing method, and storage medium for liquid processTOKYO ELECTRON LTD·Filed 2013·Granted Aug 4, 2020·5 cites·8 claims
- 3279US9731226B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 15, 2017·3 cites·9 claims
- 3379US8791030B2Coating treatment method and coating treatment apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jul 29, 2014·4 cites·21 claims
- 3479US8414972B2Coating treatment method, coating treatment apparatus, and computer-readable storage mediumYOSHIHARA KOUSUKE·Filed 2008·Granted Apr 9, 2013·5 cites·8 claims
- 3579US8225738B2Resist coating method and resist coating apparatusYOSHIHARA KOUSUKE·Filed 2011·Granted Jul 24, 2012·4 cites·13 claims
- 3679US6578772B2Treatment solution supply apparatus and treatment solution supply methodTOKYO ELECTRON LTD·Filed 2001·Granted Jun 17, 2003·23 cites·18 claims
- 3778US9165797B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTON LTD·Filed 2013·Granted Oct 20, 2015·5 cites·8 claims
- 3878US8333522B2Developing apparatus, developing method and storage mediumARIMA HIROSHI·Filed 2011·Granted Dec 18, 2012·5 cites·15 claims
- 3977US10262880B2Cover plate for wind mark control in spin coating processTOKYO ELECTRON LTD·Filed 2013·Granted Apr 16, 2019·4 cites·18 claims
- 4077US9947534B2Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow controlTOKYO ELECTRON LTD·Filed 2015·Granted Apr 17, 2018·2 cites·4 claims
- 4177US8496991B2Coating treatment methodYOSHIHARA KOUSUKE·Filed 2011·Granted Jul 30, 2013·3 cites·2 claims
- 4275US9732910B2Processing-liquid supply apparatus and processing-liquid supply methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 15, 2017·3 cites·20 claims
- 4375US9690202B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jun 27, 2017·2 cites·16 claims
- 4474US10022652B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 17, 2018·1 cites·1 claims
- 4573US9878267B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jan 30, 2018·1 cites·4 claims
- 4673US8387630B2Protective film removing device, mixed chemical solution recovering method and program storage mediumYAMAMOTO TARO·Filed 2007·Granted Mar 5, 2013·4 cites·12 claims
- 4773US8069816B2Coating film processing method and apparatusYAMAMOTO TARO·Filed 2007·Granted Dec 6, 2011·4 cites·11 claims
- 4872US10074546B2Processing liquid supplying apparatus and processing liquid supplying methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 11, 2018·2 cites·6 claims
- 4972US8980013B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2012·Granted Mar 17, 2015·2 cites·7 claims
- 5072US8216389B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2009·Granted Jul 10, 2012·3 cites·5 claims
Showing the top 50 of 109 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →