Inventor · disambiguated record
Krishanu Shome
Also filed as: SHOME KRISHANU
15 granted patents·5 pending applications·9 citations·filing 2016–2023
85Inventor score
Top patents by PatentIndex Score
20 records- 0188US11971665B2Wafer alignment using form birefringence of targets or productASML HOLDING NV·Filed 2020·Granted Apr 30, 2024·2 cites·16 claims
- 0287US11175593B2Alignment sensor apparatus for process sensitivity compensationASML NETHERLANDS BV·Filed 2019·Granted Nov 16, 2021·4 cites·38 claims
- 0379US10488767B2Alignment system wafer stack beam analyzerASML HOLDING NV·Filed 2017·Granted Nov 26, 2019·2 cites·20 claims
- 0475US11531280B2Compact alignment sensor arrangementsASML HOLDING NV·Filed 2019·Granted Dec 20, 2022·1 cites·18 claims
- 0562US10558131B2Polarization independent metrology systemASML HOLDING NV·Filed 2019·Granted Feb 11, 2020·0 cites·20 claims
- 0661US2025258439A1A lithographic apparatus, an inspection system, and a detector having a square-core fiberASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0760US11899380B2Apparatus for and method of sensing alignment marksASML HOLDING NV·Filed 2020·Granted Feb 13, 2024·0 cites·18 claims
- 0860US2025036031A1Target asymmetry measurement for substrate alignment in lithography systemsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0959US11841628B2Apparatus for and method of sensing alignment marksASML HOLDING NV·Filed 2021·Granted Dec 12, 2023·0 cites·20 claims
- 1059US11789368B2Lithographic apparatus, metrology system, and illumination systems with structured illuminationASML HOLDING NV·Filed 2020·Granted Oct 17, 2023·0 cites·20 claims
- 1157US2024201486A1Controlling aberration in an optical system, a metrology system, lithographic apparatus, and methods thereofASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1256US11703771B2Variable diffraction gratingASML HOLDING NV·Filed 2020·Granted Jul 18, 2023·0 cites·17 claims
- 1356US10338481B2Polarization independent metrology systemASML HOLDING NV·Filed 2016·Granted Jul 2, 2019·0 cites·16 claims
- 1456US2025085646A1Systems and methods for generating multiple illumination spots from a single illumination sourceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1554US2025147438A1Inspection apparatus, motorized apertures, and method backgroundASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1650US11493852B2Noise correction for alignment signalASML HOLDING NV·Filed 2019·Granted Nov 8, 2022·0 cites·14 claims
- 1749US10732524B2Optical system of an alignment systemASML HOLDING NV·Filed 2016·Granted Aug 4, 2020·0 cites·17 claims
- 1848US11347152B2Scan signal characterization diagnosticsASML NETHERLANDS BV·Filed 2018·Granted May 31, 2022·0 cites·21 claims
- 1947US11513446B2Adaptive alignmentASML HOLDING NV·Filed 2019·Granted Nov 29, 2022·0 cites·21 claims
- 2045US11016396B2Method, substrate and apparatus to measure performance of optical metrologyASML HOLDING NV·Filed 2018·Granted May 25, 2021·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →