Inventor · disambiguated record
Kurt A. Olson
Also filed as: OLSON KURT · OLSON KURT A
9 granted patents·1 pending application·234 citations·filing 1994–2008
91Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0186US6354240B1Plasma etch reactor having a plurality of magnetsTEGAL CORP·Filed 1998·Granted Mar 12, 2002·57 cites·26 claims
- 0286US5548470ACharacterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformityIBM·Filed 1994·Granted Aug 20, 1996·89 cites·21 claims
- 0379US7439188B2Reactor with heated and textured electrodes and surfacesTEGAL CORP·Filed 2001·Granted Oct 21, 2008·23 cites·12 claims
- 0476US7223699B2Plasma etch reactor and methodTEGAL CORP·Filed 2005·Granted May 29, 2007·3 cites·20 claims
- 0568US6620335B1Plasma etch reactor and methodTEGAL CORP·Filed 1999·Granted Sep 16, 2003·23 cites·19 claims
- 0667US6905969B2Plasma etch reactor and methodTEGAL CORP·Filed 2002·Granted Jun 14, 2005·7 cites·17 claims
- 0760US6774046B2Method for minimizing the critical dimension growth of a feature on a semiconductor waferTEGAL CORP·Filed 2001·Granted Aug 10, 2004·6 cites·16 claims
- 0854US2008318432A1Reactor with heated and textured electrodes and surfacesTEGAL CORP·Filed 2008·Application pending·0 cites
- 0951US6500314B1Plasma etch reactor and methodTEGAL CORP·Filed 1996·Granted Dec 31, 2002·11 cites·61 claims
- 1049US6046116AMethod for minimizing the critical dimension growth of a feature on a semiconductor waferTEGAL CORP·Filed 1997·Granted Apr 4, 2000·15 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →