Inventor · disambiguated record
Kyo Otsubo
Also filed as: OTSUBO KYO
6 granted patents·7 pending applications·0 citations·filing 2010–2025
66Inventor score
Top patents by PatentIndex Score
13 records- 0176US2023260780A1Method for cleaning substrate and cleaning deviceKIOXIA CORP·Filed 2023·Application pending·0 cites
- 0273US2025144677A1Method for cleaning substrate and cleaning deviceKIOXIA CORP·Filed 2025·Application pending·0 cites
- 0370US11651953B2Method for cleaning substrate and cleaning deviceKIOXIA CORP·Filed 2020·Granted May 16, 2023·0 cites·13 claims
- 0461US10882082B2Freeze cleaning apparatusTOSHIBA MEMORY CORP·Filed 2020·Granted Jan 5, 2021·0 cites·4 claims
- 0558US11264233B2Method for cleaning substrate and substrate processing apparatusKIOXIA CORP·Filed 2020·Granted Mar 1, 2022·0 cites·12 claims
- 0658US2024280459A1Evaluation apparatus and evaluation methodKIOXIA CORP·Filed 2024·Application pending·0 cites
- 0754US2018047565A1Method for cleaning substrate and cleaning deviceTOSHIBA MEMORY CORP·Filed 2017·Application pending·0 cites
- 0851US10692715B2Method for cleaning substrate and substrate processing apparatusTOSHIBA MEMORY CORP·Filed 2017·Granted Jun 23, 2020·0 cites·10 claims
- 0948US2018272391A1Freeze cleaning apparatusTOSHIBA MEMORY CORP·Filed 2017·Application pending·0 cites
- 1042US11185895B2Substrate processing method, substrate processing apparatus, and composite processing apparatusTOSHIBA MEMORY CORP·Filed 2019·Granted Nov 30, 2021·0 cites·5 claims
- 1135US10486203B2Substrate production method, substrate processing apparatus, and substrate production systemTOSHIBA MEMORY CORP·Filed 2016·Granted Nov 26, 2019·0 cites·21 claims
- 1232US2011053058A1Semiconductor device fabrication mask and method of manufacturing the sameOTSUBO KYO·Filed 2010·Application pending·0 cites
- 1330US2011100393A1Method of cleaning mask and mask cleaning apparatusUEMURA ERI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →