Inventor · disambiguated record
Laurent Khuat Duy
Also filed as: KHUAT DUY LAURENT
5 granted patents·32 citations·filing 2011–2012
76Inventor score
Top patents by PatentIndex Score
5 records- 0190US8610898B2Self-referencing interferometer, alignment system, and lithographic apparatusKHUAT DUY LAURENT·Filed 2011·Granted Dec 17, 2013·18 cites·19 claims
- 0282US9488465B2Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted Nov 8, 2016·8 cites·49 claims
- 0379US9081302B2Inspection apparatus and method, lithographic apparatus and lithographic processing cellDEN BOEF ARIE JEFFREY·Filed 2011·Granted Jul 14, 2015·3 cites·20 claims
- 0477US8570487B2Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrateKHUAT DUY LAURENT·Filed 2011·Granted Oct 29, 2013·3 cites·16 claims
- 0539US8675210B2Level sensor, lithographic apparatus, and substrate surface positioning methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Mar 18, 2014·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →