Inventor · disambiguated record
Lakshmanan Senthil Kumar
Also filed as: KUMAR LAKSHMANAN SENTHIL
1 granted patent·1 pending application·0 citations·filing 2017–2020
13Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0162US11003090B2Lithography apparatus comprising a plurality of individually controllable write headsZEISS CARL SMT GMBH·Filed 2020·Granted May 11, 2021·0 cites·22 claims
- 0250US2017255110A1Lithography apparatus comprising a plurality of individually controllable write headsZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →