Inventor · disambiguated record
Lars Metzger
Also filed as: METZGER LARS
9 granted patents·2 pending applications·149 citations·filing 2001–2005
88Inventor score
Top patents by PatentIndex Score
11 records- 0193US6686638B2Micromechanical component including function components suspended movably above a substrateBOSCH GMBH ROBERT·Filed 2001·Granted Feb 3, 2004·81 cites·8 claims
- 0279US7148077B2Micromechanical structural element having a diaphragm and method for producing such a structural elementBOSCH GMBH ROBERT·Filed 2004·Granted Dec 12, 2006·27 cites·14 claims
- 0375US7495302B2Micromechanical component having a diaphragmBOSCH GMBH ROBERT·Filed 2005·Granted Feb 24, 2009·8 cites·8 claims
- 0459US6905615B2Method of manufacturing a micromechanical componentBOSCH GMBH ROBERT·Filed 2002·Granted Jun 14, 2005·8 cites·7 claims
- 0558US7261825B2Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror deviceBOSCH GMBH ROBERT·Filed 2003·Granted Aug 28, 2007·8 cites·16 claims
- 0658US7060197B2Micromechanical mass flow sensor and method for the production thereofBOSCH GMBH ROBERT·Filed 2002·Granted Jun 13, 2006·10 cites·7 claims
- 0749US7321156B2Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring deviceBOSCH GMBH ROBERT·Filed 2004·Granted Jan 22, 2008·5 cites·6 claims
- 0847US7803646B2Method for producing a component having a semiconductor substrate and componentBOSCH GMBH ROBERT·Filed 2003·Granted Sep 28, 2010·2 cites·11 claims
- 0937US2006226114A1Method for producing a micromechanical device and a micromechanical deviceFISCHER FRANK·Filed 2003·Application pending·0 cites
- 1036US6867061B2Method for producing surface micromechanical structures, and sensorBOSCH GMBH ROBERT·Filed 2002·Granted Mar 15, 2005·0 cites·18 claims
- 1133US2011108932A1Micromechanical Capacitive Sensor ElementBENZEL HUBERT·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →