Inventor · disambiguated record
Lawrence D. Rotter
Also filed as: ROTTER LAWRENCE · ROTTER LAWRENCE D
18 granted patents·1 pending application·141 citations·filing 2002–2021
93Inventor score
Top patents by PatentIndex Score
19 records- 0196US9310290B2Multiple angles of incidence semiconductor metrology systems and methodsKLA TENCOR CORP·Filed 2015·Granted Apr 12, 2016·18 cites·35 claims
- 0293US8896832B2Discrete polarization scatterometryHILL ANDREW V·Filed 2011·Granted Nov 25, 2014·25 cites·35 claims
- 0391US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 0490US7061614B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2002·Granted Jun 13, 2006·43 cites·24 claims
- 0588US9400246B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2012·Granted Jul 26, 2016·5 cites·24 claims
- 0688US9116103B2Multiple angles of incidence semiconductor metrology systems and methodsKLA TENCOR CORP·Filed 2013·Granted Aug 25, 2015·7 cites·34 claims
- 0780US8643841B1Angle-resolved spectroscopic instrumentROTTER LAWRENCE D·Filed 2011·Granted Feb 4, 2014·4 cites·20 claims
- 0873US11913874B2Optical metrology tool equipped with modulated illumination sourcesKLA CORP·Filed 2021·Granted Feb 27, 2024·0 cites·12 claims
- 0973US7227637B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2006·Granted Jun 5, 2007·6 cites·21 claims
- 1069US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims
- 1169US6784991B2Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometersTHERMA WAVE INC·Filed 2002·Granted Aug 31, 2004·8 cites·12 claims
- 1266US9146156B2Light source tracking in optical metrology systemZHUANG GUORONG V·Filed 2011·Granted Sep 29, 2015·3 cites·21 claims
- 1365US9519093B2Broadband and wide field angle compensatorKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·1 cites·20 claims
- 1464US10215688B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2016·Granted Feb 26, 2019·0 cites·19 claims
- 1563US10969328B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2019·Granted Apr 6, 2021·0 cites·10 claims
- 1661US7154607B2Flat spectrum illumination source for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Dec 26, 2006·8 cites·14 claims
- 1760US8111399B2System and method for performing photothermal measurements and relaxation compensationROTTER LAWRENCE D·Filed 2009·Granted Feb 7, 2012·1 cites·20 claims
- 1855US9857292B2Broadband and wide field angle compensatorKLA TENCOR CORP·Filed 2016·Granted Jan 2, 2018·0 cites·20 claims
- 1943US2013245985A1Calibration Of An Optical Metrology System For Critical Dimension Application MatchingKLA TENCOR CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →