Inventor · disambiguated record
Lawrance Sheu
Also filed as: SHEU LAWRANCE
6 granted patents·3 pending applications·39 citations·filing 2006–2012
78Inventor score
Top patents by PatentIndex Score
9 records- 0193US7829815B2Adjustable electrodes and coils for plasma density distribution controlTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Nov 9, 2010·25 cites·38 claims
- 0289US7891536B2PVD target with end of service life detection capabilityTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Feb 22, 2011·9 cites·12 claims
- 0378US8276648B2PVD target with end of service life detection capabilityHSIAO YI-LI·Filed 2012·Granted Oct 2, 2012·1 cites·6 claims
- 0472US7642100B2Method and system for yield and productivity improvements in semiconductor processingTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Jan 5, 2010·4 cites·29 claims
- 0561US2011126397A1Pvd target with end of service life detection capabilityTAIWAN SEMICONDUCTOR MFG·Filed 2011·Application pending·0 cites
- 0655US8101052B2Adjustable anode assembly for a substrate wet processing apparatusHSIAO YI-LI·Filed 2006·Granted Jan 24, 2012·0 cites·18 claims
- 0751US8795486B2PVD target with end of service life detection capabilityHSIAO YI-LI·Filed 2006·Granted Aug 5, 2014·0 cites·20 claims
- 0851US2007068796A1Method of using a target having end of service life detection capabilityTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0950US2007163716A1Gas distribution apparatuses and methods for controlling gas distribution apparatusesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →