Pvd target with end of service life detection capability

Abstract

A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.

1 . A method comprising the steps of:
 providing a first mold member having an outer surface of a predetermined shape;   forming a layer of material about the outer surface of the first mold member; and   separating the layer of material from the first mold member,   wherein the layer of material forms an enclosure of a detector, the detector for signaling that a slab of consumable material is approaching or has been reduced to a predetermined quantity of the consumable material.   
     
     
         2 . The method of  claim 1 , wherein the slab of consumable material comprises a physical vapor deposition target. 
     
     
         3 . The method according to  claim 1 , wherein the layer of material and the slab of consumable material are composed of a same material. 
     
     
         4 . The method according to  claim 1 , further comprising the step of providing a signaling element in the enclosure to form the detector. 
     
     
         5 . The method according to  claim 4 , wherein the signaling element comprises one of a filament element, electrode elements, a gas material, a liquid material, and a solid material. 
     
     
         6 . The method according to  claim 4 , further comprising the step of embedding the detector in the slab of consumable material. 
     
     
         7 . The method according to  claim 1 , wherein the forming step is performed by physical vapor deposition, electrical chemical plating, or a combination thereof 
     
     
         8 . The method according to  claim 1 , wherein the forming step is performed by casting, extrusion, or a combination thereof. 
     
     
         9 . The method according to  claim 1 , further comprising the step of providing a second mold member having an inner surface of a predetermined shape which forms an outer surface of the layer of material during the forming step, and wherein the layer of material is separated from the second mold member during the separating step. 
     
     
         10 . The method according to  claim 1 , wherein the layer of material comprises a sheet of material and further comprising the step of bonding opposing edges of the sheet to one another. 
     
     
         11 . The method according to  claim 10 , wherein the bonding step is performed by welding.