Inventor · disambiguated record
Larissa Walter
Also filed as: WALTER LARISSA
1 granted patent·1 pending application·0 citations·filing 2021–2022
10Inventor score
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2 records- 0155US12510692B2Protection of optical materials of optical components from radiation degradationKLA CORP·Filed 2021·Granted Dec 30, 2025·0 cites·17 claims
- 0236US2023147463A1Optical element for the vuv wavelength range, optical arrangement, and method for manufacturing an optical elementZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →