Inventor · disambiguated record
Leonard E. Klebanoff
Also filed as: KLEBANOFF LEONARD · KLEBANOFF LEONARD E · KLEBANOFF LEONARD ELLIOTT
32 granted patents·2 pending applications·766 citations·filing 1975–2022
97Inventor score
Files withEUV LLC19KLA TENCOR CORP3NAT TECH & ENG SOLUTIONS SANDIA LLC3ELKAY ELECTRONICS LTD2DELGADO GILDARDO R1
Top patents by PatentIndex Score
34 records- 0196US6253464B1Method for protection of lithographic components from particle contaminationEUV LLC·Filed 2000·Granted Jul 3, 2001·73 cites·5 claims
- 0295US10000377B1Nanostructured metal amides and nitrides for hydrogen storageNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2016·Granted Jun 19, 2018·11 cites·20 claims
- 0391US6664554B2Self-cleaning optic for extreme ultraviolet lithographyEUV LLC·Filed 2001·Granted Dec 16, 2003·36 cites·18 claims
- 0491US6333775B1Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 1999·Granted Dec 25, 2001·82 cites·10 claims
- 0589US6492067B1Removable pellicle for lithographic mask protection and handlingEUV LLC·Filed 1999·Granted Dec 10, 2002·75 cites·21 claims
- 0689US6153044AProtection of lithographic components from particle contaminationEUV LLC·Filed 1998·Granted Nov 28, 2000·67 cites·25 claims
- 0788US8439534B1Mobile lighting apparatusROE GEORGE MICHAEL·Filed 2010·Granted May 14, 2013·36 cites·20 claims
- 0888US4002996ALevel detector using oscillator circuit with two capacitive probesELKAY ELECTRONICS LTD·Filed 1975·Granted Jan 11, 1977·70 cites·7 claims
- 0987US3986292AInsect killing devicePAYNE HAROLD·Filed 1975·Granted Oct 19, 1976·50 cites·3 claims
- 1085US12297960B1Flow assist vent mastNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2022·Granted May 13, 2025·1 cites·14 claims
- 1184US6772776B2Apparatus for in situ cleaning of carbon contaminated surfacesEUV LLC·Filed 2001·Granted Aug 10, 2004·23 cites·13 claims
- 1279US7147722B2Method for in-situ cleaning of carbon contaminated surfacesEUV LLC·Filed 2004·Granted Dec 12, 2006·15 cites·20 claims
- 1378US9244368B2Particle control near reticle and optics using showerheadDELGADO GILDARDO R·Filed 2013·Granted Jan 26, 2016·3 cites·16 claims
- 1478US6072157AThermophoretic vacuum wandEUV LLC·Filed 1998·Granted Jun 6, 2000·43 cites·24 claims
- 1577US6232578B1Thermophoretic vacuum wandEUV LLC·Filed 2000·Granted May 15, 2001·17 cites·23 claims
- 1677US6169652B1Electrostatically screened, voltage-controlled electrostatic chuckEUV L L C·Filed 1999·Granted Jan 2, 2001·50 cites·24 claims
- 1776US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 1874US6192897B1Apparatus and method for in-situ cleaning of resist outgassing windowsEUV LLC·Filed 1999·Granted Feb 27, 2001·26 cites·23 claims
- 1974US4083038ACondenser plate assemblyELKAY ELECTRONICS LTD·Filed 1976·Granted Apr 4, 1978·23 cites·3 claims
- 2071US6545745B2Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 2001·Granted Apr 8, 2003·9 cites·25 claims
- 2164US6549264B2Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 2001·Granted Apr 15, 2003·6 cites·25 claims
- 2261US6533952B2Mitigation of radiation induced surface contaminationEUV LLC·Filed 1999·Granted Mar 18, 2003·20 cites·10 claims
- 2356US11192783B1Ternary borides and borohydrides for hydrogen storage and method of synthesisNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2017·Granted Dec 7, 2021·0 cites·10 claims
- 2456US7473301B2Adhesive particle shieldingEUV LLC·Filed 2002·Granted Jan 6, 2009·5 cites·23 claims
- 2552US6989629B1Method and apparatus for debris mitigation for an electrical discharge sourceEUV LLC·Filed 2005·Granted Jan 24, 2006·2 cites·4 claims
- 2651US6888297B2Method and apparatus for debris mitigation for an electrical discharge sourceEUV LLC·Filed 2002·Granted May 3, 2005·2 cites·10 claims
- 2751US6231930B1Process for producing radiation-induced self-terminating protective coatings on a substrateEUV LLC·Filed 1999·Granted May 15, 2001·10 cites·10 claims
- 2846US9759912B2Particle and chemical control using tunnel flowKLA TENCOR CORP·Filed 2013·Granted Sep 12, 2017·0 cites·13 claims
- 2946US4197992AThermostat control deviceKLEBANOFF LEONARD·Filed 1978·Granted Apr 15, 1980·9 cites·4 claims
- 3045US9156068B2Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiationKLA TENCOR CORP·Filed 2014·Granted Oct 13, 2015·0 cites·38 claims
- 3139US2014158914A1Optical component with blocking surface and method thereofSANDIA CORP·Filed 2013·Application pending·0 cites
- 3236US6279601B1Liquid zone sealEUV LLC·Filed 2000·Granted Aug 28, 2001·0 cites·17 claims
- 3335US2004011381A1Method for removing carbon contamination from optic surfacesFiled 2002·Application pending·0 cites
- 3432US7740916B2Method for the protection of extreme ultraviolet lithography opticsEUV LLC·Filed 2004·Granted Jun 22, 2010·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →