Inventor · disambiguated record
Lee H. Veneklasen
Also filed as: VENEKLASEN LEE · VENEKLASEN LEE H
43 granted patents·1 pending application·1,559 citations·filing 1976–2004
98Inventor score
Top patents by PatentIndex Score
44 records- 0195US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0294US6586733B1Apparatus and methods for secondary electron emission microscope with dual beamKLA TENCOR·Filed 2000·Granted Jul 1, 2003·46 cites·21 claims
- 0394US5847959AMethod and apparatus for run-time correction of proximity effects in pattern generationETEC SYSTEMS INC·Filed 1997·Granted Dec 8, 1998·177 cites·20 claims
- 0491US6720565B2Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithographyAPPLIED MATERIALS INC·Filed 2001·Granted Apr 13, 2004·60 cites·20 claims
- 0591US6610980B2Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beamsKLA TENCOR CORP·Filed 2001·Granted Aug 26, 2003·42 cites·19 claims
- 0689US6465795B1Charge neutralization of electron beam systemsAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·40 cites·40 claims
- 0788US5876902ARaster shaped beam writing strategy system and method for pattern generationETEC SYSTEMS INC·Filed 1997·Granted Mar 2, 1999·72 cites·7 claims
- 0887US4469948AComposite concentric-gap magnetic lensPERKIN ELMER CORP·Filed 1982·Granted Sep 4, 1984·28 cites·9 claims
- 0985US6392333B1Electron gun having magnetic collimatorAPPLIED MATERIALS INC·Filed 1999·Granted May 21, 2002·44 cites·22 claims
- 1085US6274290B1Raster scan gaussian beam writing strategy and method for pattern generationETEC SYSTEMS INC·Filed 1998·Granted Aug 14, 2001·43 cites·9 claims
- 1185US5552659AStructure and fabrication of gated electron-emitting device having electron optics to reduce electron-beam divergenceSILICON VIDEO CORP·Filed 1994·Granted Sep 3, 1996·49 cites·26 claims
- 1282US5784925AVacuum compatible linear motion deviceETEC SYSTEMS INC·Filed 1996·Granted Jul 28, 1998·35 cites·42 claims
- 1381US6803572B2Apparatus and methods for secondary electron emission microscope with dual beamKLA TENCOR TECH CORP·Filed 2003·Granted Oct 12, 2004·13 cites·19 claims
- 1481US4038543AScanning transmission electron microscope including an improved image detectorSIEMENS AG·Filed 1976·Granted Jul 26, 1977·22 cites·15 claims
- 1579US6563124B2Electron beam apparatus having traversing circuit boardsAPPLIED MATERIALS INC·Filed 2001·Granted May 13, 2003·17 cites·21 claims
- 1679US4066905AParticle beam apparatus with zones of different pressureSIEMENS AG·Filed 1976·Granted Jan 3, 1978·22 cites·7 claims
- 1778US6373071B1Real-time prediction of proximity resist heating and correction of raster scan electron beam lithographyAPPLIED MATERIALS INC·Filed 1999·Granted Apr 16, 2002·32 cites·19 claims
- 1877US6262429B1Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash fieldETEC SYSTEMS INC·Filed 1999·Granted Jul 17, 2001·35 cites·30 claims
- 1976US6300630B1Annular differential seal for electron beam apparatus using isolation valve and additional differential pumpingETEC SYSTEMS INC·Filed 1999·Granted Oct 9, 2001·28 cites·13 claims
- 2076US6259106B1Apparatus and method for controlling a beam shapeETEC SYSTEMS INC·Filed 1999·Granted Jul 10, 2001·40 cites·10 claims
- 2175US6215128B1Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Apr 10, 2001·34 cites·22 claims
- 2275US4788431ASpecimen distance measuring systemPERKIN ELMER CORP·Filed 1987·Granted Nov 29, 1988·21 cites·18 claims
- 2374US5729022AComposite concentric-gap magnetic lens and deflector with conical pole piecesETEC SYSTEMS INC·Filed 1996·Granted Mar 17, 1998·23 cites·16 claims
- 2474US4818838AApparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systemsPERKIN ELMER CORP·Filed 1988·Granted Apr 4, 1989·42 cites·14 claims
- 2572US4397611AParticle beam instrumentation ion pumpPERKIN ELMER CORP·Filed 1981·Granted Aug 9, 1983·16 cites·6 claims
- 2671US6515282B1Testing of interconnection circuitry using two modulated charged particle beamsAPPLIED MATERIALS INC·Filed 2000·Granted Feb 4, 2003·10 cites·26 claims
- 2765US5900667AOperating a solid state particle detector within a magnetic deflection field so as to minimize eddy currentsETEC SYSTEMS INC·Filed 1996·Granted May 4, 1999·17 cites·8 claims
- 2864US6011269AShaped shadow projection for an electron beam columnETEC SYSTEMS INC·Filed 1998·Granted Jan 4, 2000·16 cites·15 claims
- 2963US5838006AConical baffle for reducing charging drift in a particle beam systemETEC SYSTEMS INC·Filed 1996·Granted Nov 17, 1998·16 cites·18 claims
- 3062US6768117B1Immersion lens with magnetic shield for charged particle beam systemAPPLIED MATERIALS INC·Filed 2000·Granted Jul 27, 2004·4 cites·8 claims
- 3162US6476401B1Moving photocathode with continuous regeneration for image conversion in electron beam lithographyAPPLIED MATERIALS INC·Filed 1999·Granted Nov 5, 2002·16 cites·35 claims
- 3262US6455863B1Apparatus and method for forming a charged particle beam of arbitrary shapeAPPLIED MATERIALS INC·Filed 1999·Granted Sep 24, 2002·16 cites·23 claims
- 3362US4695773AField emission gun electrode geometry for improved focus stabilityPERKIN ELMER CORP·Filed 1984·Granted Sep 22, 1987·13 cites·4 claims
- 3460US6541770B1Charged particle system error diagnosisAPPLIED MATERIALS INC·Filed 2000·Granted Apr 1, 2003·9 cites·21 claims
- 3560US6002135AMagnetic lens and deflector with inner and outer pole pieces with conical inner pole pieceETEC SYSTEMS INC·Filed 1998·Granted Dec 14, 1999·12 cites·19 claims
- 3659US6924494B2Method of exposing a target to a charged particle beamAPPLIED MATERIALS INC·Filed 2004·Granted Aug 2, 2005·3 cites·30 claims
- 3755US6326635B1Minimization of electron fogging in electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Dec 4, 2001·12 cites·14 claims
- 3855US4956024ANon-contacting method of cleaning surfaces with a planoar gas bearingPERKIN ELMER CORP·Filed 1989·Granted Sep 11, 1990·14 cites·20 claims
- 3954US4101778ARod-shaped specimen holder for an optical corpuscular-beam apparatusSIEMENS AG·Filed 1976·Granted Jul 18, 1978·7 cites·2 claims
- 4051US4097739ABeam deflection and focusing system for a scanning corpuscular-beam microscopeSIEMENS AG·Filed 1976·Granted Jun 27, 1978·6 cites·3 claims
- 4147US6828570B2Technique for writing with a raster scanned beamAPPLIED MATERIALS INC·Filed 2002·Granted Dec 7, 2004·2 cites·20 claims
- 4239US4044256ASupport stand for a corpuscular-beam microscopeSIEMENS AG·Filed 1976·Granted Aug 23, 1977·3 cites·3 claims
- 4335US4337422AField emission gun with noise compensationPERKIN ELMER CORP·Filed 1980·Granted Jun 29, 1982·2 cites·7 claims
- 4430US2002104970A1Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash fieldFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →