Inventor · disambiguated record
Linnell Martinez
Also filed as: MARTINEZ LINNELL
31 granted patents·2 pending applications·84 citations·filing 2012–2023
96Inventor score
Top patents by PatentIndex Score
33 records- 0197US11315757B2Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applicationsMKS INSTR INC·Filed 2020·Granted Apr 26, 2022·7 cites·39 claims
- 0295US11996274B2Real-time, non-invasive IEDF plasma sensorMKS INSTR INC·Filed 2022·Granted May 28, 2024·3 cites·39 claims
- 0395US8802545B2Method and apparatus for plasma dicing a semi-conductor waferJOHNSON CHRIS·Filed 2012·Granted Aug 12, 2014·15 cites·5 claims
- 0495US8785332B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Jul 22, 2014·15 cites·2 claims
- 0593US8778806B2Method and apparatus for plasma dicing a semi-conductor waferJOHNSON CHRIS·Filed 2012·Granted Jul 15, 2014·10 cites·12 claims
- 0691US9711406B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2016·Granted Jul 18, 2017·6 cites·7 claims
- 0791US8691702B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Apr 8, 2014·13 cites·6 claims
- 0883US9070760B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Jun 30, 2015·3 cites·21 claims
- 0982US11747494B2Ion filter using aperture plate with plurality of zonesPLASMA THERM LLC·Filed 2020·Granted Sep 5, 2023·1 cites·17 claims
- 1080US8796154B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Aug 5, 2014·2 cites·11 claims
- 1177US9911654B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2016·Granted Mar 6, 2018·1 cites·8 claims
- 1276US9564366B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Feb 7, 2017·1 cites·3 claims
- 1375US9082839B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2014·Granted Jul 14, 2015·3 cites·14 claims
- 1473US8980764B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Mar 17, 2015·1 cites·5 claims
- 1572US9105705B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Aug 11, 2015·1 cites·26 claims
- 1670US12500066B2Non-invasive IED estimation for pulsed-DC and low frequency applicationsMKS INC·Filed 2023·Granted Dec 16, 2025·0 cites·37 claims
- 1769US9343365B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted May 17, 2016·2 cites·9 claims
- 1868US11488865B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2019·Granted Nov 1, 2022·0 cites·8 claims
- 1967US10707060B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2018·Granted Jul 7, 2020·0 cites·12 claims
- 2065US10741447B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2018·Granted Aug 11, 2020·0 cites·14 claims
- 2162US12489018B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2022·Granted Dec 2, 2025·0 cites·8 claims
- 2261US10297427B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted May 21, 2019·0 cites·6 claims
- 2361US9202721B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2014·Granted Dec 1, 2015·0 cites·7 claims
- 2460US9202720B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Dec 1, 2015·0 cites·5 claims
- 2559US9496177B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Nov 15, 2016·0 cites·6 claims
- 2658US10573557B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted Feb 25, 2020·0 cites·7 claims
- 2755US2024055228A1Plasma Process Control of Multi-Electrode Systems Equipped with Ion Energy SensorsMKS INSTR INC·Filed 2022·Application pending·0 cites
- 2853US8946058B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Feb 3, 2015·0 cites·42 claims
- 2951US2018143332A1Ion FilterPLASMA THERM LLC·Filed 2017·Application pending·0 cites
- 3049US9368404B2Method for dicing a substrate with back metalPLASMA THERM LLC·Filed 2013·Granted Jun 14, 2016·0 cites·15 claims
- 3148US10497621B2Method for dicing a substrate with back metalPLASMA THERM LLC·Filed 2016·Granted Dec 3, 2019·0 cites·13 claims
- 3248US9202737B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted Dec 1, 2015·0 cites·7 claims
- 3341USRE46339EMethod and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Mar 14, 2017·0 cites·42 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →