Inventor · disambiguated record
Ludovic Godet
Also filed as: GODET LUDOVIC
244 granted patents·86 pending applications·1,118 citations·filing 2004–2025
99Inventor score
Files withAPPLIED MATERIALS INC238VARIAN SEMICONDUCTOR EQUIPMENT33GODET LUDOVIC22VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9HATEM CHRISTOPHER R4
Top patents by PatentIndex Score
330 records- 0198US9502258B2Anisotropic gap etchAPPLIED MATERIALS INC·Filed 2014·Granted Nov 22, 2016·129 cites·14 claims
- 0298US8815720B2Method of etching a workpieceGODET LUDOVIC·Filed 2012·Granted Aug 26, 2014·102 cites·9 claims
- 0398US7767977B1Ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 3, 2010·72 cites·16 claims
- 0497US11610925B2Imaging system and method of creating composite imagesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 21, 2023·5 cites·16 claims
- 0597US11112694B2Methods of forming variable-depth device structuresAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·5 cites·27 claims
- 0697US10203604B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 12, 2019·16 cites·16 claims
- 0797US9964863B1Post exposure processing apparatusAPPLIED MATERIALS INC·Filed 2017·Granted May 8, 2018·22 cites·14 claims
- 0897US9829790B2Immersion field guided exposure and post-exposure bake processAPPLIED MATERIALS INC·Filed 2015·Granted Nov 28, 2017·12 cites·15 claims
- 0997US9777378B2Advanced process flow for high quality FCVD filmsAPPLIED MATERIALS INC·Filed 2015·Granted Oct 3, 2017·18 cites·19 claims
- 1097US9412613B2Development of high etch selective hardmask material by ion implantation into amorphous carbon filmsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 9, 2016·54 cites·10 claims
- 1197US9377692B2Electric/magnetic field guided acid diffusionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·18 cites·12 claims
- 1297US8101510B2Plasma processing apparatusGODET LUDOVIC·Filed 2009·Granted Jan 24, 2012·50 cites·19 claims
- 1396US11524392B2Minimal contact gripping of thin optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Dec 13, 2022·3 cites·16 claims
- 1496US10358715B2Integrated cluster tool for selective area depositionAPPLIED MATERIALS INC·Filed 2016·Granted Jul 23, 2019·15 cites·17 claims
- 1596US9716005B1Plasma poisoning to enable selective depositionAPPLIED MATERIALS INC·Filed 2016·Granted Jul 25, 2017·13 cites·6 claims
- 1696US8133804B1Method and system for modifying patterned photoresist using multi-step ion implantationGODET LUDOVIC·Filed 2010·Granted Mar 13, 2012·35 cites·20 claims
- 1795US9823570B2Field guided post exposure bake application for photoresist microbridge defectsAPPLIED MATERIALS INC·Filed 2015·Granted Nov 21, 2017·6 cites·20 claims
- 1895US9123509B2Techniques for plasma processing a substratePAPASOULIOTIS GEORGE D·Filed 2011·Granted Sep 1, 2015·39 cites·19 claims
- 1995US8698107B2Technique and apparatus for monitoring ion mass, energy, and angle in processing systemsGODET LUDOVIC·Filed 2011·Granted Apr 15, 2014·26 cites·14 claims
- 2095US8288741B1Apparatus and method for three dimensional ion processingMILLER TIMOTHY J·Filed 2011·Granted Oct 16, 2012·26 cites·16 claims
- 2194US9798240B2Controlling photo acid diffusion in lithography processesAPPLIED MATERIALS INC·Filed 2014·Granted Oct 24, 2017·7 cites·12 claims
- 2294US9733579B2Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layerAPPLIED MATERIALS INC·Filed 2014·Granted Aug 15, 2017·10 cites·15 claims
- 2394US9280070B2Field guided exposure and post-exposure bake processAPPLIED MATERIALS INC·Filed 2014·Granted Mar 8, 2016·10 cites·13 claims
- 2494US8664098B2Plasma processing apparatusGODET LUDOVIC·Filed 2012·Granted Mar 4, 2014·7 cites·17 claims
- 2594US8460569B2Method and system for post-etch treatment of patterned substrate featuresGODET LUDOVIC·Filed 2011·Granted Jun 11, 2013·18 cites·7 claims
- 2694US7586100B2Closed loop control and process optimization in plasma doping processes using a time of flight ion detectorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Sep 8, 2009·35 cites·25 claims
- 2793US12019242B2Full-field metrology tool for waveguide combiners and meta-surfacesAPPLIED MATERIALS INC·Filed 2022·Granted Jun 25, 2024·2 cites·20 claims
- 2893US11754919B2Lithography method to form structures with slanted angleAPPLIED MATERIALS INC·Filed 2021·Granted Sep 12, 2023·2 cites·20 claims
- 2993US11614685B2Patterning of multi-depth optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Mar 28, 2023·2 cites·20 claims
- 3093US11333896B2Fabrication of diffraction gratingsAPPLIED MATERIALS INC·Filed 2019·Granted May 17, 2022·4 cites·17 claims
- 3193US10935799B2Optical component having depth modulated angled gratings and method of formationAPPLIED MATERIALS INC·Filed 2018·Granted Mar 2, 2021·10 cites·15 claims
- 3293US10192775B2Methods for gapfill in high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2017·Granted Jan 29, 2019·7 cites·13 claims
- 3393US9515166B2Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applicationsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 6, 2016·14 cites·19 claims
- 3493US9385219B2Method and apparatus for selective depositionAPPLIED MATERIALS INC·Filed 2015·Granted Jul 5, 2016·11 cites·20 claims
- 3593US9366966B2Electric/magnetic field guided acid profile control in a photoresist layerAPPLIED MATERIALS INC·Filed 2014·Granted Jun 14, 2016·8 cites·19 claims
- 3693US8188445B2Ion sourceGODET LUDOVIC·Filed 2010·Granted May 29, 2012·15 cites·19 claims
- 3793US7453059B2Technique for monitoring and controlling a plasma processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 18, 2008·21 cites·31 claims
- 3892US11262662B2Post exposure processing apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·2 cites·19 claims
- 3992US11029206B2Methods and apparatus for waveguide metrologyAPPLIED MATERIALS INC·Filed 2019·Granted Jun 8, 2021·5 cites·19 claims
- 4092US10157740B1Selective deposition process utilizing polymer structure deactivation processAPPLIED MATERIALS INC·Filed 2017·Granted Dec 18, 2018·7 cites·15 claims
- 4192US9748148B2Localized stress modulation for overlay and EPEAPPLIED MATERIALS INC·Filed 2015·Granted Aug 29, 2017·8 cites·15 claims
- 4292US9190498B2Technique for forming a FinFET device using selective ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 17, 2015·15 cites·7 claims
- 4391US11222809B2Patterned vacuum chuck for double-sided processingAPPLIED MATERIALS INC·Filed 2020·Granted Jan 11, 2022·2 cites·20 claims
- 4491US10775158B2System and method for detecting etch depth of angled surface relief gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 15, 2020·7 cites·16 claims
- 4591US10474033B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2017·Granted Nov 12, 2019·4 cites·18 claims
- 4690US11111176B1Methods and apparatus of processing transparent substratesAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·2 cites·18 claims
- 4789US11608558B2Multi-depth film for optical devicesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 21, 2023·2 cites·6 claims
- 4889US11112697B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·3 cites·10 claims
- 4989US9502262B2Nanocrystalline diamond carbon film for 3D NAND hardmask applicationAPPLIED MATERIALS INC·Filed 2015·Granted Nov 22, 2016·5 cites·18 claims
- 5089US9232628B2Method and system for plasma-assisted ion beam processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 5, 2016·4 cites·11 claims
Showing the top 50 of 330 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →