Inventor · disambiguated record
Lukasz J. Hupka
Also filed as: HUPKA LUKASZ · HUPKA LUKASZ J
5 granted patents·2 pending applications·23 citations·filing 2008–2022
76Inventor score
Top patents by PatentIndex Score
7 records- 0191US8513127B2Chemical mechanical planarization processes for fabrication of FinFET devicesCHANG JOSEPHINE B·Filed 2011·Granted Aug 20, 2013·10 cites·20 claims
- 0289US8524606B2Chemical mechanical planarization with overburden maskCHARNS LESLIE·Filed 2011·Granted Sep 3, 2013·11 cites·25 claims
- 0372US8497210B2Shallow trench isolation chemical mechanical planarizationCHARNS LESLIE·Filed 2011·Granted Jul 30, 2013·2 cites·25 claims
- 0454US8252119B2Microelectronic substrate cleaning systems with polyelectrolyte and associated methodsGREELEY JOSEPH N·Filed 2008·Granted Aug 28, 2012·0 cites·18 claims
- 0552US8507383B2Fabrication of replacement metal gate devicesANDO TAKASHI·Filed 2011·Granted Aug 13, 2013·0 cites·24 claims
- 0651US2025300258A1Battery fractionation unit and battery fractionation methodREGAIN SP Z O O·Filed 2022·Application pending·0 cites
- 0748US2012298158A1Microelectronic substrate cleaning systems with polyelectrolyte and associated methodsGREELEY JOSEPH N·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →