Inventor · disambiguated record
Lucian Jdira
Also filed as: JDIRA LUCIAN · JDIRA LUCIAN C
21 granted patents·11 pending applications·987 citations·filing 2011–2025
94Inventor score
Top patents by PatentIndex Score
32 records- 0198US10103040B1Apparatus and method for manufacturing a semiconductor deviceASM IP HOLDING BV·Filed 2017·Granted Oct 16, 2018·466 cites·23 claims
- 0295US10900122B2Apparatus for semiconductor wafer processingASM IP HOLDING BV·Filed 2016·Granted Jan 26, 2021·7 cites·20 claims
- 0394US12077854B2Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2022·Granted Sep 3, 2024·1 cites·19 claims
- 0494US8398773B2Thermal processing furnace and liner for the sameJDIRA LUCIAN C·Filed 2011·Granted Mar 19, 2013·468 cites·13 claims
- 0593US10844484B2Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methodsASM IP HOLDING BV·Filed 2018·Granted Nov 24, 2020·10 cites·11 claims
- 0688US10954597B2Atomic layer deposition apparatusASM IP HOLDING BV·Filed 2015·Granted Mar 23, 2021·8 cites·31 claims
- 0787US9153466B2Wafer boatASM IP HOLDING BV·Filed 2013·Granted Oct 6, 2015·10 cites·7 claims
- 0885US10683571B2Gas supply manifold and method of supplying gases to chamber using sameASM IP HOLDING BV·Filed 2014·Granted Jun 16, 2020·8 cites·20 claims
- 0984US2024392435A1Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1083US12467141B2Injector configured for arrangement within a reaction chamber of a substrate processing apparatusASM IP HOLDING BV·Filed 2024·Granted Nov 11, 2025·0 cites·18 claims
- 1182US11230766B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jan 25, 2022·3 cites·13 claims
- 1280US10343907B2Method and system for delivering hydrogen peroxide to a semiconductor processing chamberASM IP HOLDING BV·Filed 2015·Granted Jul 9, 2019·3 cites·11 claims
- 1380US2025129473A1Method and apparatuses for temperature indexed aldASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1478US2025389485A1Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1575US10605530B2Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnaceASM IP HOLDING BV·Filed 2017·Granted Mar 31, 2020·2 cites·29 claims
- 1674US11891696B2Injector configured for arrangement within a reaction chamber of a substrate processing apparatusASM IP HOLDING BV·Filed 2021·Granted Feb 6, 2024·0 cites·18 claims
- 1774US2024384411A1Substrate processing apparatus with an injectorASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1869US12366410B2Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2022·Granted Jul 22, 2025·0 cites·17 claims
- 1968US9431238B2Reactive curing process for semiconductor substratesASM IP HOLDING BV·Filed 2015·Granted Aug 30, 2016·1 cites·31 claims
- 2064US12195852B2Substrate processing apparatus with an injectorASM IP HOLDING BV·Filed 2021·Granted Jan 14, 2025·0 cites·13 claims
- 2160US2020071828A1Temperature-indexed thin film deposition reactorsASM IP HOLDING BV·Filed 2019·Application pending·0 cites
- 2259US2022268520A1Vertical furnace reactor assembly, method of aligning annular flange units, and useASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2359US2023002889A1Chemical vapor depospition furnace for depositing filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2458US2025069911A1Apparatus constructed and arranged to process a plurality of substratesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2558US2025183065A1Flange and apparatus for processing substratesASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 2657US12243757B2Flange and apparatus for processing substratesASM IP HOLDING BV·Filed 2021·Granted Mar 4, 2025·0 cites·20 claims
- 2756US11971217B2Batch furnace assembly and method of operating a batch furnace assemblyASM IP HOLDING BV·Filed 2022·Granted Apr 30, 2024·0 cites·13 claims
- 2849US2017029948A1Methods and apparatuses for temperature-indexed thin film depositionASM IP HOLDING BV·Filed 2015·Application pending·0 cites
- 2948US12412759B2Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatusASM IP HOLDING BV·Filed 2021·Granted Sep 9, 2025·0 cites·21 claims
- 3048US2017011910A1Reactive curing process for semiconductor substratesASM IP HOLDING BV·Filed 2016·Application pending·0 cites
- 3142US10858738B2Wafer boat cooldown deviceASM INT NV·Filed 2019·Granted Dec 8, 2020·0 cites·18 claims
- 3233US11830730B2Layer forming method and apparatusASM IP HOLDING BV·Filed 2017·Granted Nov 28, 2023·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →