Inventor · disambiguated record
Mathew Abraham
Also filed as: ABRAHAM MATHEW · Abraham Mathew Cheeran
15 granted patents·2 pending applications·121 citations·filing 1999–2019
91Inventor score
Top patents by PatentIndex Score
17 records- 0197US9685371B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2014·Granted Jun 20, 2017·35 cites·13 claims
- 0296US9888554B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2016·Granted Feb 6, 2018·9 cites·14 claims
- 0395US9330939B2Method of enabling seamless cobalt gap-fillZOPE BHUSHAN N·Filed 2013·Granted May 3, 2016·50 cites·18 claims
- 0487US10362664B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2018·Granted Jul 23, 2019·2 cites·10 claims
- 0587US9570307B2Methods of doping substrates with ALDAPPLIED MATERIALS INC·Filed 2015·Granted Feb 14, 2017·5 cites·10 claims
- 0682US9842769B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·3 cites·20 claims
- 0782US9218973B2Methods of doping substrates with ALDAPPLIED MATERIALS INC·Filed 2013·Granted Dec 22, 2015·5 cites·12 claims
- 0874US9378941B2Interface treatment of semiconductor surfaces with high density low energy plasmaAPPLIED MATERIALS INC·Filed 2013·Granted Jun 28, 2016·3 cites·11 claims
- 0967US10477662B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2019·Granted Nov 12, 2019·0 cites·20 claims
- 1065US11013096B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2019·Granted May 18, 2021·0 cites·13 claims
- 1156US11690159B2Apparatus and method for extending target material delivery system lifetimeASML NETHERLANDS BV·Filed 2019·Granted Jun 27, 2023·0 cites·20 claims
- 1256US10269633B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2017·Granted Apr 23, 2019·0 cites·19 claims
- 1349US10699946B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2016·Granted Jun 30, 2020·0 cites·20 claims
- 1446US9543172B2Apparatus for providing and directing heat energy in a process chamberAPPLIED MATERIALS INC·Filed 2013·Granted Jan 10, 2017·0 cites·19 claims
- 1545US6433663B1High voltage transformer arrangementTHOMSON LICENSING SA·Filed 1999·Granted Aug 13, 2002·9 cites·23 claims
- 1640US2014273504A1Selective deposition by light exposureAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1733US2011117680A1Inline detection of substrate positioning during processingAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →