Inventor · disambiguated record
Marcel Beckers
Also filed as: BECKERS MARCEL
38 granted patents·1 pending application·233 citations·filing 2004–2019
97Inventor score
Files withASML NETHERLANDS BV25BECKERS MARCEL5KEMPER NICOLAAS RUDOLF2VAN DE KERKHOF MARCUS ADRIANUS2JANSSEN FRANCISCUS JOHANNES JOSEPH1
Top patents by PatentIndex Score
39 records- 0196US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 0296US7411654B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·22 cites·58 claims
- 0395US7057702B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 6, 2006·89 cites·40 claims
- 0493US9857695B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 2, 2018·3 cites·20 claims
- 0592US9182678B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2012·Granted Nov 10, 2015·6 cites·20 claims
- 0691US8587762B2Methods relating to immersion lithography and an immersion lithographic apparatusSTREEFKERK BOB·Filed 2008·Granted Nov 19, 2013·15 cites·29 claims
- 0791US8421996B2Lithographic apparatusLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Apr 16, 2013·7 cites·20 claims
- 0890US9983489B2Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiationASML NETHERLANDS BV·Filed 2015·Granted May 29, 2018·5 cites·21 claims
- 0988US7411658B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·8 cites·32 claims
- 1087US10495984B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 3, 2019·1 cites·20 claims
- 1186US10209629B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 19, 2019·1 cites·20 claims
- 1286US8233134B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2008·Granted Jul 31, 2012·6 cites·18 claims
- 1385US7808614B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 5, 2010·6 cites·19 claims
- 1483US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 1582US7542127B2Lithographic apparatus and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2005·Granted Jun 2, 2009·7 cites·29 claims
- 1679US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
- 1777US8976334B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Mar 10, 2015·1 cites·22 claims
- 1869US9477158B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2006·Granted Oct 25, 2016·2 cites·20 claims
- 1969US8462314B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Jun 11, 2013·3 cites·28 claims
- 2068US7271873B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 18, 2007·3 cites·28 claims
- 2163US9429853B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Aug 30, 2016·0 cites·20 claims
- 2261US10088755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 2, 2018·0 cites·20 claims
- 2361US10018925B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 10, 2018·0 cites·21 claims
- 2461US2018292762A1Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 2560US9606429B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 28, 2017·0 cites·20 claims
- 2660US8988651B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Mar 24, 2015·0 cites·22 claims
- 2759US9036127B2Lithographic apparatusVAN DEN DUNGEN CLEMENS JOHANNES GERARDUS·Filed 2009·Granted May 19, 2015·1 cites·20 claims
- 2859US8259287B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Sep 4, 2012·0 cites·22 claims
- 2958US10649341B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 12, 2020·0 cites·22 claims
- 3058US8004654B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 23, 2011·0 cites·20 claims
- 3157US9715179B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 25, 2017·0 cites·20 claims
- 3256US7522261B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 21, 2009·3 cites·29 claims
- 3355US10802410B2Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquidASML NETHERLANDS BV·Filed 2016·Granted Oct 13, 2020·0 cites·21 claims
- 3455US9465302B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 11, 2016·0 cites·20 claims
- 3555US8958054B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Feb 17, 2015·0 cites·20 claims
- 3648US7072021B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 4, 2006·3 cites·11 claims
- 3747US8427629B2Lithographic apparatus and device manufacturing methodLUIJTEN CARLO CORNELIS MARIA·Filed 2010·Granted Apr 23, 2013·0 cites·20 claims
- 3845US7136142B2Lithographic apparatus having a gas flushing deviceASML NETHERLANDS BV·Filed 2004·Granted Nov 14, 2006·2 cites·47 claims
- 3935US7148951B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →