Inventor · disambiguated record
Markus Degünther
Also filed as: DEGUENTHER MARKUS · DEGÜNTHER MARKUS
3 granted patents·1 pending application·23 citations·filing 2004–2015
62Inventor score
Top patents by PatentIndex Score
4 records- 0192US10042248B2Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unitZEISS CARL SMT GMBH·Filed 2015·Granted Aug 7, 2018·22 cites·20 claims
- 0249US9046787B2Microlithographic projection exposure apparatusGRUNER TORALF·Filed 2011·Granted Jun 2, 2015·0 cites·23 claims
- 0348US2008192224A1Microlithographic Projection Exposure ApparatusZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 0447US6885434B2Diaphragm for an integrator unitZEISS CARL SMT AG·Filed 2004·Granted Apr 26, 2005·1 cites·19 claims
Join the waitlist — get patent alerts
Get an alert when Markus Degünther files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →