Inventor · disambiguated record
Matthew Derstine
Also filed as: DERSTINE MATTHEW · DERSTINE MATTHEW W · DERSTINE MATTHEW WILLIAM
33 granted patents·3 pending applications·340 citations·filing 1999–2025
97Inventor score
Top patents by PatentIndex Score
36 records- 0195US9775226B1Method and system for generating a light-sustained plasma in a flanged transmission elementKLA TENCOR CORP·Filed 2014·Granted Sep 26, 2017·22 cites·46 claims
- 0294US9185788B2Method and system for controlling convection within a plasma cellKLA TENCOR CORP·Filed 2014·Granted Nov 10, 2015·17 cites·54 claims
- 0393US9723703B2System and method for transverse pumping of laser-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Aug 1, 2017·14 cites·31 claims
- 0493US9390902B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·13 cites·19 claims
- 0593US9263238B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Feb 16, 2016·10 cites·39 claims
- 0691US9927094B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2013·Granted Mar 27, 2018·11 cites·23 claims
- 0790US8259771B1Initiating laser-sustained plasmaSHCHEMELININ ANATOLY·Filed 2010·Granted Sep 4, 2012·18 cites·20 claims
- 0889US9530636B2Light source with nanostructured antireflection layerKLA TENCOR CORP·Filed 2015·Granted Dec 27, 2016·7 cites·49 claims
- 0989US6339506B1Microlens array with spatially varying optical propertyONI SYSTEMS CORP·Filed 1999·Granted Jan 15, 2002·108 cites·5 claims
- 1088US9721761B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Aug 1, 2017·4 cites·70 claims
- 1186US11778720B2High efficiency laser-sustained plasma light source with collection of broadband radiationKLA CORP·Filed 2020·Granted Oct 3, 2023·1 cites·25 claims
- 1286US9558858B2System and method for imaging a sample with a laser sustained plasma illumination outputKLA TENCOR CORP·Filed 2014·Granted Jan 31, 2017·9 cites·31 claims
- 1382US9941655B2High power broadband light sourceKLA TENCOR CORP·Filed 2015·Granted Apr 10, 2018·3 cites·44 claims
- 1481US10887974B2High efficiency laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Jan 5, 2021·2 cites·31 claims
- 1581US8698399B2Multi-wavelength pumping to sustain hot plasmaBEZEL ILYA V·Filed 2010·Granted Apr 15, 2014·8 cites·19 claims
- 1680US9655225B2Method and system for controlling convection within a plasma cellKLA TENCOR CORP·Filed 2015·Granted May 16, 2017·2 cites·43 claims
- 1778US11121521B2System and method for pumping laser sustained plasma with interlaced pulsed illumination sourcesKLA CORP·Filed 2020·Granted Sep 14, 2021·1 cites·34 claims
- 1875US11262591B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA TENCOR CORP·Filed 2018·Granted Mar 1, 2022·2 cites·27 claims
- 1974US10714327B2System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illuminationKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·1 cites·44 claims
- 2074US6442322B1Optical fiber management deviceJDS UNIPHASE CORP·Filed 2000·Granted Aug 27, 2002·21 cites·9 claims
- 2173US8658967B2Optically pumping to sustain plasmaBEZEL ILYA·Filed 2012·Granted Feb 25, 2014·4 cites·18 claims
- 2273US6339503B1Optical interconnect using microlens/minilens relayONI SYSTEMS CORP·Filed 1999·Granted Jan 15, 2002·43 cites·40 claims
- 2369US2021231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light SourceKLA CORP·Filed 2021·Application pending·0 cites
- 2464US11921297B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA CORP·Filed 2022·Granted Mar 5, 2024·0 cites·34 claims
- 2561US10976025B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2018·Granted Apr 13, 2021·0 cites·8 claims
- 2659US9534848B2Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperaturesKLA TENCOR CORP·Filed 2013·Granted Jan 3, 2017·1 cites·18 claims
- 2758US2025305959A1Optical analysis systems and methodsMGI TECH CO LTD·Filed 2025·Application pending·0 cites
- 2857US11262664B2System and method for protecting optics from vacuum ultraviolet lightKLA CORP·Filed 2020·Granted Mar 1, 2022·0 cites·21 claims
- 2957US10568195B2System and method for pumping laser sustained plasma with a frequency converted illumination sourceKLA TENCOR CORP·Filed 2018·Granted Feb 18, 2020·0 cites·36 claims
- 3056US9887076B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Feb 6, 2018·0 cites·18 claims
- 3155US12510692B2Protection of optical materials of optical components from radiation degradationKLA CORP·Filed 2021·Granted Dec 30, 2025·0 cites·17 claims
- 3252US6606429B1Electromechanically controlled optical elementNEPTEC OPTICAL SOLUTIONS INC·Filed 1999·Granted Aug 12, 2003·18 cites·8 claims
- 3351US10495287B1Nanocrystal-based light source for sample characterizationKLA TENCOR CORP·Filed 2018·Granted Dec 3, 2019·0 cites·42 claims
- 3447US9097577B2Adaptive optics for compensating aberrations in light-sustained plasma cellsBEZEL ILYA·Filed 2012·Granted Aug 4, 2015·0 cites·38 claims
- 3547US8178860B2Image collectionKIRK GREGORY L·Filed 2009·Granted May 15, 2012·0 cites·18 claims
- 3638US2001006568A111/2 X 2 Optical switchFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →