Inventor · disambiguated record
Martin Ebert
Also filed as: EBERT MARTIN
28 granted patents·4 pending applications·191 citations·filing 2000–2023
96Inventor score
Files withASML NETHERLANDS BV10THERMA WAVE INC8TOKYO ELECTRON LTD3UNIV SOUTHAMPTON3DEN BOEF ARIE JEFFREY1
Top patents by PatentIndex Score
32 records- 0198US10379445B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2018·Granted Aug 13, 2019·13 cites·20 claims
- 0298US10133188B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2016·Granted Nov 20, 2018·10 cites·25 claims
- 0391US6952258B2Wafer chuck with integrated reference sampleTHERMA WAVE INC·Filed 2004·Granted Oct 4, 2005·60 cites·26 claims
- 0489US10254658B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2016·Granted Apr 9, 2019·4 cites·16 claims
- 0584US8830472B2Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatusDEN BOEF ARIE JEFFREY·Filed 2009·Granted Sep 9, 2014·8 cites·15 claims
- 0678US10338401B2Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 2, 2019·2 cites·21 claims
- 0777US6952261B2System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot sizeTHERMA WAVE INC·Filed 2003·Granted Oct 4, 2005·20 cites·3 claims
- 0874US7697135B1Scanning focal length metrologyNANOMETRICS INC·Filed 2007·Granted Apr 13, 2010·6 cites·30 claims
- 0974US6798512B2Multiple beam ellipsometerTHERMA WAVE INC·Filed 2002·Granted Sep 28, 2004·12 cites·22 claims
- 1072US11429029B2Method and apparatus for illumination adjustmentASML NETHERLANDS BV·Filed 2020·Granted Aug 30, 2022·0 cites·20 claims
- 1172US9753296B2Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 5, 2017·1 cites·20 claims
- 1270US11580274B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Feb 14, 2023·1 cites·20 claims
- 1369US12204826B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1469US6757059B2Wafer chuck with integrated reference sampleTHERMA WAVE INC·Filed 2002·Granted Jun 29, 2004·12 cites·27 claims
- 1569US6747746B2System and method for finding the center of rotation of an R-theta stageTHERMA WAVE INC·Filed 2002·Granted Jun 8, 2004·18 cites·21 claims
- 1668US12189182B2Photonic chip and method of manufactureUNIV SOUTHAMPTON·Filed 2020·Granted Jan 7, 2025·0 cites·14 claims
- 1768US11874540B2Capacitor resonator modulatorUNIV SOUTHAMPTON·Filed 2022·Granted Jan 16, 2024·0 cites·29 claims
- 1865US12339493B2Photonic chip and method of manufactureUNIV SOUTHAMPTON·Filed 2020·Granted Jun 24, 2025·0 cites·25 claims
- 1963US6624403B2Autofocus systemTHERMA WAVE INC·Filed 2001·Granted Sep 23, 2003·9 cites·20 claims
- 2061US7342661B2Method for noise improvement in ellipsometersTHERMA WAVE INC·Filed 2005·Granted Mar 11, 2008·3 cites·10 claims
- 2158US7321427B2Multiple beam ellipsometerTOKYO ELECTRON LTD·Filed 2006·Granted Jan 22, 2008·1 cites·10 claims
- 2257US10620550B2Metrology method and apparatusASML NETHERLANDS BV·Filed 2018·Granted Apr 14, 2020·0 cites·17 claims
- 2354US7136164B2Multiple beam ellipsometerTOKYO ELECTRON LTD·Filed 2005·Granted Nov 14, 2006·0 cites·16 claims
- 2453US2018364590A1Polarization tuning in scatterometryASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
- 2552US6411381B1Method of reducing noise generated by arc lamps in optical systems employing slitsUNIV NORTH CAROLINA STATE·Filed 2000·Granted Jun 25, 2002·4 cites·23 claims
- 2648US6985228B2Multiple beam ellipsometerTOKYO ELECTRON LTD·Filed 2004·Granted Jan 10, 2006·1 cites·17 claims
- 2745US7030984B2Fast wafer positioning method for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Apr 18, 2006·2 cites·10 claims
- 2844US8259296B1Scanning focal length metrologyYARUSSI RICHARD A·Filed 2010·Granted Sep 4, 2012·0 cites·20 claims
- 2943US2003086083A1Optical metrology tool with dual camera path for simultaneous high and low magnification imagingFiled 2002·Application pending·0 cites
- 3032US2003093164A1System for providing communication between a GUI and metrology control softwareFiled 2002·Application pending·0 cites
- 3130US2003081216A1Graphical user interface for sample positioningFiled 2002·Application pending·0 cites
- 3227USD488767SConvertible top for an automobileFiled 2001·Granted Apr 20, 2004·4 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →