Inventor · disambiguated record
Mark E. Emerson
Also filed as: EMERSON MARK · EMERSON MARK E
10 granted patents·1 pending application·17 citations·filing 2010–2025
83Inventor score
Top patents by PatentIndex Score
11 records- 0189US8766213B2Automated method for coincident alignment of a laser beam and a charged particle beamSTRAW MARCUS·Filed 2012·Granted Jul 1, 2014·8 cites·19 claims
- 0287US11408734B2Distance measurement between gas distribution device and substrate support at high temperaturesLAM RES CORP·Filed 2019·Granted Aug 9, 2022·2 cites·24 claims
- 0381US9754764B2Method for coincident alignment of a laser beam and a charged particle beamFEI CO·Filed 2016·Granted Sep 5, 2017·2 cites·19 claims
- 0479US12050112B2Distance measurement between gas distribution device and substrate support at high temperaturesLAM RES CORP·Filed 2022·Granted Jul 30, 2024·0 cites·24 claims
- 0572US2025293063A1Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2025·Application pending·0 cites
- 0671US9263235B2Method for coincident alignment of a laser beam and a charged particle beamSTRAW MARCUS·Filed 2014·Granted Feb 16, 2016·2 cites·19 claims
- 0768US10436829B2Apparatus for measuring condition of electroplating cell components and associated methodsLAM RES CORP·Filed 2017·Granted Oct 8, 2019·1 cites·29 claims
- 0859US9679741B2Environmental cell for charged particle beam systemNOVAK LIBOR·Filed 2010·Granted Jun 13, 2017·2 cites·40 claims
- 0956US12341040B2Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2020·Granted Jun 24, 2025·0 cites·19 claims
- 1056US10989747B2Apparatus for measuring condition of electroplating cell components and associated methodsLAM RES CORP·Filed 2019·Granted Apr 27, 2021·0 cites·20 claims
- 1148US12168301B2Fixture for automatic calibration of substrate transfer robotLAM RES CORP·Filed 2020·Granted Dec 17, 2024·0 cites·21 claims
Join the waitlist — get patent alerts
Get an alert when Mark E. Emerson files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →