Inventor · disambiguated record
Makoto Ezumi
Also filed as: EZUMI MAKOTO
55 granted patents·5 pending applications·1,202 citations·filing 1994–2013
99Inventor score
Top patents by PatentIndex Score
60 records- 0199US6538249B1Image-formation apparatus using charged particle beams under various focus conditionsHITACHI LTD·Filed 2000·Granted Mar 25, 2003·118 cites·36 claims
- 0298US6847038B2Scanning electron microscopeHITACHI LTD·Filed 2003·Granted Jan 25, 2005·74 cites·12 claims
- 0398US5872358AScanning electron microscopeHITACHI LTD·Filed 1996·Granted Feb 16, 1999·132 cites·29 claims
- 0496US6946656B2Sample electrification measurement method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Sep 20, 2005·56 cites·32 claims
- 0596US5900629AScanning electron microscopeHITACHI LTD·Filed 1998·Granted May 4, 1999·83 cites·31 claims
- 0695US7087899B2Sample electrification measurement method and charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Aug 8, 2006·19 cites·19 claims
- 0795US7075078B2Scanning electron microscopeHITACHI LTD·Filed 2005·Granted Jul 11, 2006·20 cites·12 claims
- 0895US6646262B1Scanning electron microscopeHITACHI LTD·Filed 2000·Granted Nov 11, 2003·57 cites·18 claims
- 0995US6635873B1Scanning electron microscope with voltage applied to the sampleHITACHI LTD·Filed 2000·Granted Oct 21, 2003·45 cites·9 claims
- 1093US7372028B2Sample electrification measurement method and charged particle beam apparatusHITACHI LTD·Filed 2006·Granted May 13, 2008·14 cites·20 claims
- 1193US7109485B2Charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Sep 19, 2006·19 cites·5 claims
- 1293US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 1392US6787772B2Scanning electron microscopeHITACHI LTD·Filed 2001·Granted Sep 7, 2004·32 cites·15 claims
- 1492US5608218AScanning electron microscopeHITACHI LTD·Filed 1994·Granted Mar 4, 1997·69 cites·22 claims
- 1591US6084238AScanning electron microscopeHITACHI LTD·Filed 1998·Granted Jul 4, 2000·47 cites·13 claims
- 1690US7977632B2Scanning electron microscopeHITACHI LTD·Filed 2008·Granted Jul 12, 2011·8 cites·2 claims
- 1790US7700918B2Sample electrification measurement method and charged particle beam apparatusHITACHI LTD·Filed 2008·Granted Apr 20, 2010·8 cites·14 claims
- 1890US7642514B2Charged particle beam apparatusHITACHI LTD·Filed 2007·Granted Jan 5, 2010·14 cites·8 claims
- 1990US7282722B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 16, 2007·10 cites·10 claims
- 2090US6653633B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Nov 25, 2003·22 cites·7 claims
- 2189US7355174B2Charged particle beam emitting device and method for adjusting the optical axisHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 8, 2008·10 cites·8 claims
- 2289US7329868B2Charged particle beam apparatusHITACHI LTD·Filed 2006·Granted Feb 12, 2008·7 cites·3 claims
- 2388US7714286B2Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program thereforHITACHI HIGH TECH CORP·Filed 2008·Granted May 11, 2010·11 cites·13 claims
- 2488US7408172B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 5, 2008·8 cites·10 claims
- 2588US6885001B2Scanning electron microscopeHITACHI LTD·Filed 2004·Granted Apr 26, 2005·20 cites·13 claims
- 2688US6872944B2Scanning electron microscopeHITACHI LTD·Filed 2003·Granted Mar 29, 2005·24 cites·6 claims
- 2787US7459681B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 2, 2008·8 cites·15 claims
- 2886US7399966B2Scanning electron microscopeHITACHI LTD·Filed 2007·Granted Jul 15, 2008·6 cites·5 claims
- 2985US7022983B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Apr 4, 2006·15 cites·18 claims
- 3084US7442923B2Scanning electron microscopeHITACHI LTD·Filed 2005·Granted Oct 28, 2008·5 cites·3 claims
- 3184US7315024B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 1, 2008·5 cites·17 claims
- 3284US6956211B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 18, 2005·15 cites·14 claims
- 3384US6936818B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Aug 30, 2005·12 cites·6 claims
- 3484US6667476B2Scanning electron microscopeHITACHI LTD·Filed 1999·Granted Dec 23, 2003·40 cites·30 claims
- 3583US6512228B2Scanning electron microscopeHITACHI LTD·Filed 2002·Granted Jan 28, 2003·17 cites·3 claims
- 3682US7838827B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 23, 2010·4 cites·7 claims
- 3782US7718976B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 18, 2010·6 cites·14 claims
- 3882US7049591B2Scanning electron microscopeHITACHI LTD·Filed 2004·Granted May 23, 2006·11 cites·9 claims
- 3982US6444981B1Scanning electron microscopeHITACHI LTD·Filed 1999·Granted Sep 3, 2002·34 cites·18 claims
- 4079US7612336B2Scanning electron microscope having a monochromatorHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 3, 2009·4 cites·5 claims
- 4178US8481934B2Method for inspecting and measuring sample and scanning electron microscopeEZUMI MAKOTO·Filed 2011·Granted Jul 9, 2013·3 cites·8 claims
- 4278US7294835B2Scanning electron microscopeHITACHI LTD·Filed 2006·Granted Nov 13, 2007·3 cites·10 claims
- 4378US6069356AScanning electron microscopeHITACHI LTD·Filed 1999·Granted May 30, 2000·21 cites·6 claims
- 4477US7960696B2Method for inspecting and measuring sample and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 14, 2011·4 cites·4 claims
- 4576US7605381B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Oct 20, 2009·9 cites·7 claims
- 4675US7659508B2Method for measuring dimensions of sample and scanning electron microscopeHITACHI LTD·Filed 2002·Granted Feb 9, 2010·11 cites·11 claims
- 4768US8338781B2Charged particle beam scanning method and charged particle beam apparatusSASAKI YUKO·Filed 2011·Granted Dec 25, 2012·2 cites·7 claims
- 4866US7566872B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 28, 2009·1 cites·8 claims
- 4965US7935925B2Charged particle beam scanning method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 3, 2011·1 cites·6 claims
- 5063US2010006755A1Charged particle beam alignment method and charged particle beam apparatusSATO MITSUGO·Filed 2009·Application pending·0 cites
Showing the top 50 of 60 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →