Inventor · disambiguated record
Matthew Bertram Edward Griffiths
Also filed as: GRIFFITHS MATTHEW · GRIFFITHS MATTHEW BERTRAM EDWARD
1 granted patent·5 pending applications·0 citations·filing 2016–2023
9Inventor score
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6 records- 0157US2023235451A1Molybdenum-dad precursors for deposition of molybdenum filmsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0251US2025305124A1In situ treatment of molybdenum oxyhalide byproducts in semiconductor processing equipmentLAM RES CORP·Filed 2023·Application pending·0 cites
- 0350US10801105B2Process for the generation of thin inorganic filmsBASF SE·Filed 2016·Granted Oct 13, 2020·0 cites·14 claims
- 0449US2025259894A1Molybdenum integration and void-free fillLAM RES CORP·Filed 2023·Application pending·0 cites
- 0547US2025069948A1Deposition of metals in recessed features with the use of halogen-containing deposition inhibitorsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0647US2025183041A1Low resistance molybdenum deposition for logic source/drain contactsLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →